公开(公告)号：US08029863B2

公开(公告)日：2011-10-04

申请号：US12230924

申请日：2008-09-08

Applicant: Agnès Fonverne ,  Jean Dijon ,  Florence Ricoul ,  Emmanuelle Rouviere

Inventor： Agnès Fonverne ,  Jean Dijon ,  Florence Ricoul ,  Emmanuelle Rouviere

IPC: B32B38/00 ,  C23C16/00

CPC classification number: B81C1/00206 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00824 ,  B01J2219/00831 ,  B01J2219/00835 ,  B01J2219/00846 ,  B01J2219/00862 ,  B01J2219/00869 ,  B01J2219/00873 ,  B01L3/502707 ,  B01L3/502753 ,  B01L2300/0816 ,  B01L2300/0887 ,  B01L2300/12 ,  B81B2201/058 ,  B81B2203/0338 ,  B81C2201/019 ,  B81C2203/038

Abstract: A microfluidic component comprises at least one closed microchannel filled with nanostructures. The microchannel is produced by previously forming an opening delineating a bottom wall and two opposite side walls of the microchannel in a surface of a substrate. The nanostructures filling said microchannel are formed by in situ growth to constitute a layer of metallic catalyst deposited on said side walls and on said wall bottom. The microchannel is closed, before the nanostructures are formed, by sealing a protective cover onto said surface of the substrate. Sealing is obtained by formation of an eutectic compound between a material of the cover and the metal of the catalyst used for in situ growth of the nanostructures and deposited on the surface of the substrate designed to come into contact with the cover.

Abstract translation: 微流体组分包括填充有纳米结构的至少一个闭合微通道。 微通道预先形成在衬底的表面中描绘微通道的底壁和两个相对的侧壁的开口。 填充所述微通道的纳米结构通过原位生长形成，以构成沉积在所述侧壁上和所述壁底上的金属催化剂层。 在形成纳米结构之前，通过将保护盖密封在基材的所述表面上来封闭微通道。 通过在盖的材料和用于纳米结构的原位生长的催化剂的金属之间形成共晶化合物并沉积在设计成与盖接触的基板的表面上来获得密封。