公开(公告)号：US06683317B1

公开(公告)日：2004-01-27

申请号：US10278998

申请日：2002-10-24

Applicant: Jonathon Yancey Simmons ,  Andrew Devaney

Inventor： Jonathon Yancey Simmons ,  Andrew Devaney

IPC: H01J3708

CPC classification number: F16L25/02 ,  H01J2237/166

Abstract: An electrically insulating vacuum coupling for use in an ion implanter for connecting any two parts of the vacuum chamber housing together while maintaining the electrical potentials of the two parts. The coupling comprises an inner sleeve of ceramic material (e.g. Al2O3) and an outer sleeve of a polymer/litharge mixture. The polymer may be a urethane polymer. Litharge is included in the material of the outer sleeve to absorb x-rays produced within the vacuum chamber. The coupling is particularly useful for coupling an ion source to the main housing of the vacuum chamber

Abstract translation: 一种用于离子注入机的电绝缘真空联接器，用于将真空室壳体的任何两个部分连接在一起，同时保持两部分的电位。 联接器包括陶瓷材料（例如Al 2 O 3）的内套筒和聚合物/锂聚合物的外套筒。 聚合物可以是聚氨酯聚合物。 Litharge包含在外套筒的材料中以吸收在真空室内产生的x射线。 耦合对于将离子源耦合到真空室的主壳体特别有用

公开(公告)号：US20050056794A1

公开(公告)日：2005-03-17

申请号：US10688076

申请日：2003-10-17

Applicant: Jonathon Simmons ,  John Shelley ,  Andrew Devaney

Inventor： Jonathon Simmons ,  John Shelley ,  Andrew Devaney

IPC: H01J37/02 ,  H01J37/08 ,  H01J37/317

CPC classification number: H01J37/08 ,  H01J27/024 ,  H01J37/023 ,  H01J37/3171 ,  H01J2237/032 ,  H01J2237/061

Abstract: A kinematic electrode mount is provided for an ion implanter in which an electrode insert member having an electrode body portion which defines an aperture, is inserted into an electrode support frame. In one embodiment, a first kinematic alignment pin of the insert member engages a first, groove-shaped kinematic alignment surface of the electrode support frame to align the first alignment pin in two orthogonal directions relative to the electrode support frame. In addition, a second kinematic alignment pin of the insert member engages a second kinematic alignment surface of the electrode support frame to align the insert member in a rotational orientation relative to the electrode support frame. A plurality of flanges of the insert member engage the electrode support frame to retain the insert member in the aligned position and to electrically couple the electrode insert member to the electrode support frame. A spring positioned between the electrode insert member and the electrode support frame biases the electrode insert member in the aligned and retained position relative to the electrode support frame. In another embodiment, the electrode support frame has alignment pins and the insert member has alignment slots.

Abstract translation: 提供了一种用于离子注入机的运动电极座，其中具有限定孔的电极主体部分的电极插入件被插入到电极支撑框架中。 在一个实施例中，插入构件的第一运动学对准销接合电极支撑框架的第一槽形运动学对准表面，以使第一对准销相对于电极支撑框架在两个正交方向上对齐。 此外，插入构件的第二运动学对准销接合电极支撑框架的第二运动学对准表面，以使插入构件相对于电极支撑框架以旋转取向对准。 插入构件的多个凸缘接合电极支撑框架以将插入构件保持在对准位置并且将电极插入构件电耦合到电极支撑框架。 位于电极插入构件和电极支撑框架之间的弹簧将电极插入构件相对于电极支撑框架偏置在对准和保持位置。 在另一个实施例中，电极支撑框架具有对准销，插入件具有对准槽。