公开(公告)号：US20140024161A1

公开(公告)日：2014-01-23

申请号：US14001799

申请日：2012-02-02

Applicant: Stéphane Renard ,  Antoine Filipe ,  Joël Collet

Inventor： Stéphane Renard ,  Antoine Filipe ,  Joël Collet

IPC: B81C1/00

CPC classification number: B81C1/00666 ,  B81B2201/0235 ,  B81B2207/096 ,  B81C1/00357 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/123 ,  G01P2015/084 ,  G01P2015/088

Abstract: An inertial sensor including at least one measurement beam and one active body formed of a proof body and of deformable plates, said active body being maintained in suspension inside of a tight enclosure via its plates, the measurement beam connecting a portion of the proof body to an internal wall of said enclosure, said measurement beam having a lower thickness than the proof body.

Abstract translation: 一种惯性传感器，包括至少一个测量光束和由一个证明体和一个可变形的板形成的一个活动体，所述主动体经由其板被保持在紧密封闭的内部悬挂，测量光束将一部分证明体连接到 所述外壳的内壁，所述测量光束的厚度小于所述检验体。

公开(公告)号：US20120267730A1

公开(公告)日：2012-10-25

申请号：US13451367

申请日：2012-04-19

Applicant: Stéphane RENARD ,  Antoine FILIPE ,  Joël COLLET ,  François-Xavier BOILLOT

Inventor： Stéphane RENARD ,  Antoine FILIPE ,  Joël COLLET ,  François-Xavier BOILLOT

IPC: H01L29/84 ,  H01L21/50

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81C2201/019 ,  B81C2203/036

Abstract: A micro-electromechanical system (MEMS) device for measuring accelerations, angular rates, or for actuation comprises at least two substrates and at least one movable structure arranged in a cavity between the substrates. An electrically conducting frame surrounding the movable structure is arranged at an interface of the two substrates. The frame is electrically separated from the movable structure and connected by at least first and second electrically conducting connections to the first and second substrates, respectively. The frame may have a width of not more than 150 preferably not more than 50 μm. The first connection is at an interface between the frame and the first substrate. The second connection is a layer applied at an outer periphery of the frame and a peripheral face of the second substrate. The structure keeps electrical fields and electromagnetic disturbances away from the sensor and may also be used for shielding micro-electronic circuits.

Abstract translation: 用于测量加速度，角速率或用于致动的微机电系统（MEMS）装置包括至少两个基板和布置在基板之间的空腔中的至少一个可移动结构。 围绕可移动结构的导电框架布置在两个基板的界面处。 框架与可移动结构电分离，并通过至少第一和第二导电连接分别连接到第一和第二基板。 框架可以具有不大于150的宽度，优选不大于50μm。 第一连接在框架和第一基板之间的界面处。 第二连接是施加在框架的外周和第二基板的周面的层。 该结构使电场和电磁干扰远离传感器，也可用于屏蔽微电子电路。