公开(公告)号：US08686372B2

公开(公告)日：2014-04-01

申请号：US13307244

申请日：2011-11-30

Applicant: Thomas Missalla ,  Max Christian Schuermann ,  Denis Bolshukhin ,  Boris Tkachenko

Inventor： Thomas Missalla ,  Max Christian Schuermann ,  Denis Bolshukhin ,  Boris Tkachenko

IPC: G01T1/29

CPC classification number: G01J1/4257 ,  G01J1/0437 ,  G01J1/58

Abstract: Spatial acquisition of measurement data over a cross section of a high-energy, high-intensity radiation beam bundle without impairment of measuring accuracy due to saturation or degradation of detectors occurs by imaging an entire cross section of the beam bundle on a shading element, the cross section being separated successively into partial beam bundles having reduced cross sections and reduced intensity through movement of at least one opening, whereby measurement values of the partial beam bundles passing the opening are associated temporally and spatially with positions of the opening.

Abstract translation: 在高能量高强度辐射束束的横截面上空间采集测量数据，而不会由于检测器的饱和或劣化而损害测量精度，因此通过将束束的整个横截面成像在遮蔽元件上， 横截面通过至少一个开口的移动被连续分离成具有减小的横截面和减小的强度的部分束束，由此通过开口的部分束束的测量值在开口的位置处在时间上和空间上相关联。

公开(公告)号：US20100078578A1

公开(公告)日：2010-04-01

申请号：US12563305

申请日：2009-09-21

Applicant: Max Christian Schuermann ,  Boris Tkachenko ,  Denis Bolshukhin ,  Juergen Kleinschmidt ,  Guido Schriever

Inventor： Max Christian Schuermann ,  Boris Tkachenko ,  Denis Bolshukhin ,  Juergen Kleinschmidt ,  Guido Schriever

IPC: G21K5/00

CPC classification number: H05G2/003 ,  G03F7/70033 ,  G03F7/70841 ,  G03F7/70916

Abstract: The invention is directed to a method for operating plasma-based short-wavelength radiation sources, particularly EUV radiation sources, having a long lifetime and to an arrangement for generating plasma-based short-wavelength radiation. It is the object of the invention to find a novel possibility for operating plasma-based short-wavelength radiation sources with a long lifetime which permits extensive debris mitigation without the main process of radiation generation being severely impaired through the use of buffer gas and without the need for substantial additional expenditure for generating partial pressure in a spatially narrowly limited manner. According to the invention, this object is met in that hydrogen gas as buffer gas (41) is introduced into the vacuum chamber (1) under a pressure such that a pressure-distance product in the range of 1 to 100 Pa·m is realized while taking into account the geometric radiation paths of the radiation emitted by the emitter plasma (21) within the buffer gas (41; 44), and the vacuum chamber (1) is continuously evacuated for adjusting a quasistatic pressure (42; 47) and for removing residual emitter material and buffer gas (41).

Abstract translation: 本发明涉及一种用于操作具有长寿命的基于等离子体的短波长辐射源，特别是EUV辐射源的方法和用于产生基于等离子体的短波长辐射的装置。 本发明的目的是找到一种具有长寿命的基于等离子体的短波长辐射源的新型可能性，其允许广泛的碎片减轻，而不会通过使用缓冲气体严重损害主要的辐射发生过程，而不需要 需要在空间狭窄限制的方式产生分压的大量额外支出。 根据本发明，通过将氢气作为缓冲气体（41）在压力范围为1〜100Pa·m的压力下被引入真空室（1）中， 同时考虑由缓冲气体（41; 44）内的发射体等离子体（21）发射的辐射的几何辐射路径，并且真空室（1）被连续抽真空以调节准静压（42; 47）和 用于去除残留的发射体材料和缓冲气体（41）。

公开(公告)号：US20120138805A1

公开(公告)日：2012-06-07

申请号：US13307244

申请日：2011-11-30

Applicant: Thomas Missalla ,  Max Christian Schuermann ,  Denis Bolshukhin ,  Boris Tkachenko

Inventor： Thomas Missalla ,  Max Christian Schuermann ,  Denis Bolshukhin ,  Boris Tkachenko

IPC: G01T1/20 ,  G01T1/00

CPC classification number: G01J1/4257 ,  G01J1/0437 ,  G01J1/58

Abstract: The invention is directed to methods and arrangements for spatial acquisition of measurement data over the cross section of a bundle of high-energy, high-intensity radiation. The object of finding a novel possibility for radiation measurement within the cross section of a beam bundle of high intensity which acquires highly spatially resolved measurement data without impairment of the measuring accuracy through saturation or degradation of the detectors is met according to the invention in that the entire cross section of the beam bundle is imaged on a shading element, the cross section is separated successively into partial beam bundles having reduced cross section and reduced intensity through movement of at least one opening, and measurement values of the partial beam bundles passing the opening are acquired so as to be associated temporally and spatially with the positions of the opening and are stored.

Abstract translation: 本发明涉及用于在一束高能量，高强度辐射的横截面上空间采集测量数据的方法和装置。 根据本发明，满足高强度束束的横截面中的辐射测量的新颖可能性的目的是获得高度空间分辨的测量数据，而不会通过检测器的饱和或劣化而损害测量精度，因为根据本发明， 束束的整个横截面被成像在遮光元件上，横截面被依次分离成具有通过至少一个开口的移动而具有减小的横截面和减小的强度的部分束束，并且部分束束的测量值通过开口 被采集以便在时间和空间上与开口的位置相关联并被存储。