公开(公告)号：US07541584B2

公开(公告)日：2009-06-02

申请号：US10524140

申请日：2003-08-13

Applicant: Jarek Antoszewski ,  John M Dell ,  Lorenzo Faraone ,  Charles A Musca ,  Kevin J Winchester

Inventor： Jarek Antoszewski ,  John M Dell ,  Lorenzo Faraone ,  Charles A Musca ,  Kevin J Winchester

IPC: H01L27/14

CPC classification number: G01J3/02 ,  G01J3/0256 ,  G01J3/26 ,  G02B26/001 ,  H01L31/02327 ,  H01L31/02966 ,  H01L31/1013 ,  H01L31/1032

Abstract: A detector device for detecting incident radiation at particular wavelengths is disclosed. The device includes a base layer comprising a substrate. A resonant cavity is formed on the base layer between a pair of reflectors. One reflector is formed by a first reflector layer disposed in fixed relationship with respect to the base layer and the other reflector is formed by a second reflector layer disposed on a membrane in substantially parallel relationship to the substrate. A detector is provided within the cavity to absorb incident radiation therein for detection purposes. By placing the absorbing layer of the detector within the resonant cavity, high quantum efficiency can be achieved using very thin absorbing layers, thus significantly reducing the detector volume and hence noise. Various different arrangements of the detector device and different methods of fabricating the same are also disclosed.

Abstract translation: 公开了用于检测特定波长的入射辐射的检测器装置。 该装置包括包含基底的基层。 在一对反射器之间的基底层上形成谐振腔。 一个反射器由相对于基底层固定关系设置的第一反射器层形成，而另一个反射器由设置在膜上的与基底基本平行的第二反射层形成。 在腔内提供检测器以吸收其中的入射辐射用于检测目的。 通过将检测器的吸收层放置在谐振腔内，可以使用非常薄的吸收层实现高量子效率，从而显着降低检测器体积，从而显着降低噪声。 还公开了检测器装置的各种不同布置及其制造方法。