CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR FORMING PARYLENE FILM
    1.
    发明申请
    CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR FORMING PARYLENE FILM 有权
    化学蒸气沉积装置和形成片状薄膜的方法

    公开(公告)号:US20110151121A1

    公开(公告)日:2011-06-23

    申请号:US12876226

    申请日:2010-09-06

    Abstract: A chemical vapor deposition apparatus and a method for forming a parylene film are provided. The chemical vapor deposition apparatus includes a buffer chamber, a deposition chamber, a pyrolysis chamber and an evaporator. The buffer chamber has a first valve and a second valve. The evaporator is connected with the second valve. The pyrolysis chamber is connected with the evaporator through a first pipe, wherein the first pipe has a third valve. The deposition chamber is connected with the pyrolysis chamber.

    Abstract translation: 提供化学气相沉积设备和形成聚对二甲苯膜的方法。 化学气相沉积装置包括缓冲室,沉积室,热解室和蒸发器。 缓冲室具有第一阀和第二阀。 蒸发器与第二阀连接。 热解室通过第一管与蒸发器连接,其中第一管具有第三阀。 沉积室与热解室连接。

    Method of forming parylene film
    3.
    发明授权
    Method of forming parylene film 有权
    形成聚对二甲苯膜的方法

    公开(公告)号:US08889224B2

    公开(公告)日:2014-11-18

    申请号:US12876226

    申请日:2010-09-06

    Abstract: A method for forming a parylene film is provided, which includes following steps. Providing a chemical vapor deposition apparatus including a buffer chamber having first and second valves and a rotative carrying apparatus, an evaporator connected with the second valve, a pyrolysis chamber connected with the evaporator, and a deposition chamber connected with the pyrolysis chamber. Placing a parylene material in the rotative carrying apparatus of the buffer chamber through the first valve. Turning off the first and second valves and balancing a pressure in the buffer chamber and a pressure in the evaporator. Turning on the second valve and delivering the parylene material into the evaporator. Evaporating the parylene material in the evaporator to form a parylene gas. Pyrolyzing the parylene gas in the pyrolysis chamber to form a parylene monomer. Delivering the parylene monomer to the deposition chamber for deposition so as to form a parylene film.

    Abstract translation: 提供了形成聚对二甲苯膜的方法,其包括以下步骤。 提供一种化学气相沉积设备,包括具有第一和第二阀的缓冲室和旋转运载装置,与第二阀连接的蒸发器,与蒸发器连接的热解室以及与热解室连接的沉积室。 通过第一阀将缓冲室的旋转输送装置中的聚对二甲苯材料放置。 关闭第一和第二阀并平衡缓冲室中的压力和蒸发器中的压力。 打开第二个阀门并将聚对二甲苯材料输送到蒸发器中。 在蒸发器中蒸发聚对二甲苯材料以形成对二甲苯气体。 在热解室中热解聚对二甲苯以形成聚对二甲苯单体。 将聚对二甲苯单体输送到沉积室以进行沉积以形成聚对二甲苯膜。

    Wafer bonding method
    4.
    发明授权
    Wafer bonding method 有权
    晶圆接合法

    公开(公告)号:US07371661B2

    公开(公告)日:2008-05-13

    申请号:US11432632

    申请日:2006-05-12

    CPC classification number: H01L21/187 H01L33/0079

    Abstract: A wafer bonding method, comprising steps of: coating a medium layer respectively on the surfaces of two wafers; removing impurities formed on the surface of each medium layer; laminating the two wafers while enabling the surface coated with the medium layer of one of the two wafers to face the surface coated with the medium layer of another wafer; and applying an ultra-sonic oscillation and a bonding pressure upon the laminated wafers for bonding the two wafers.

    Abstract translation: 一种晶片接合方法,包括以下步骤:分别在两个晶片的表面上涂覆介质层; 去除形成在每个介质层表面上的杂质; 层压两个晶片同时使得涂覆有两个晶片之一的介质层的表面面对涂覆有另一晶片的介质层的表面; 以及在层叠的晶片上施加超声波振荡和接合压力以接合两个晶片。

    Wafer bonding method
    5.
    发明申请
    Wafer bonding method 有权
    晶圆接合法

    公开(公告)号:US20070148911A1

    公开(公告)日:2007-06-28

    申请号:US11432632

    申请日:2006-05-12

    CPC classification number: H01L21/187 H01L33/0079

    Abstract: A wafer bonding method, comprising steps of: coating a medium layer respectively on the surfaces of two wafers; removing impurities formed on the surface of each medium layer; laminating the two wafers while enabling the surface coated with the medium layer of one of the two wafers to face the surface coated with the medium layer of another wafer; and applying an ultra-sonic oscillation and a bonding pressure upon the laminated wafers for bonding the two wafers.

    Abstract translation: 一种晶片接合方法,包括以下步骤:分别在两个晶片的表面上涂覆介质层; 去除形成在每个介质层表面上的杂质; 层压两个晶片同时使得涂覆有两个晶片之一的介质层的表面面对涂覆有另一晶片的介质层的表面; 以及在层叠的晶片上施加超声波振荡和接合压力以接合两个晶片。

    Device and method for powder distribution and additive manufacturing method using the same
    7.
    发明申请
    Device and method for powder distribution and additive manufacturing method using the same 有权
    用于粉末分配的装置和方法及使用其的添加剂制造方法

    公开(公告)号:US20130186514A1

    公开(公告)日:2013-07-25

    申请号:US13460259

    申请日:2012-04-30

    Abstract: The present disclosure provides a device and method for powder distribution and an additive manufacturing method, wherein different size or kind of powders could be chosen to be accommodated within a receptacle. The receptacle can uniformly mix the powder by a rotation movement, pour out the powders by the rotation movement and distribute the powders for forming a layer by a translation movement. In another embodiment, the receptacle further comprises a heating element for preheating the powders. Not only can the present disclosure uniformly mix the powders so as to reduce the thermal deformation and distribute the powder layer compactly, but also can the present disclosure distribute different kinds of powder in different layer so as to increase the diversity in additive manufacturing.

    Abstract translation: 本公开内容提供了用于粉末分配的装置和方法以及添加剂制造方法,其中可以选择将不同尺寸或种类的粉末容纳在容器内。 容器可以通过旋转运动均匀地混合粉末,通过旋转运动倾倒粉末,并通过平移运动分布用于形成层的粉末。 在另一个实施例中,插座还包括用于预热粉末的加热元件。 本发明不仅可以均匀地混合粉末,以减少热变形并且紧密地分布粉末层,而且本公开也可以在不同的层中分配不同种类的粉末,以增加添加剂制造的多样性。

    Method and apparatus for inspecting radio frequency identification tags
    8.
    发明授权
    Method and apparatus for inspecting radio frequency identification tags 有权
    用于检查射频识别标签的方法和装置

    公开(公告)号:US07973646B2

    公开(公告)日:2011-07-05

    申请号:US11944596

    申请日:2007-11-23

    CPC classification number: G06K7/0008 G01R31/2822 G06K7/10079 G06K7/10435

    Abstract: A method and an apparatus for inspecting radio frequency identification (RFID) tags which utilize a way of shielding for inspecting whether RFID tags function properly or not. The method of the present invention comprises steps of: reading a plurality of RFID tags in a readable zone; and determining whether there is any malfunctional RFID tag in the plurality of RFID tags. If all the plurality of RFID tags function properly, the method will check a next plurality of RFID tags. If there is at least one unreadable RFID tag, the at least one malfunctional RFID tag will be found by shielding one or the plurality of RFID tags. By means of the disclosure in the present invention, the present method and apparatus are capable of improving the efficiency during inspection and simplifying the design of a readable zone.

    Abstract translation: 一种用于检查射频识别(RFID)标签的方法和装置,其利用屏蔽方式来检查RFID标签是否正常工作。 本发明的方法包括以下步骤:读取可读区域中的多个RFID标签; 以及确定所述多个RFID标签中是否存在任何故障的RFID标签。 如果所有多个RFID标签正常工作,则该方法将检查下一个RFID标签。 如果存在至少一个不可读RFID标签,则通过屏蔽一个或多个RFID标签来找到至少一个故障的RFID标签。 通过本发明的公开内容,本发明的方法和装置能够提高检查期间的效率并简化可读区域的设计。

    METHOD AND APPARATUS FOR INSPECTING RADIO FREQUENCY IDENTIFICATION TAGS
    9.
    发明申请
    METHOD AND APPARATUS FOR INSPECTING RADIO FREQUENCY IDENTIFICATION TAGS 有权
    检测无线电频率识别标签的方法和装置

    公开(公告)号:US20080174407A1

    公开(公告)日:2008-07-24

    申请号:US11944596

    申请日:2007-11-23

    CPC classification number: G06K7/0008 G01R31/2822 G06K7/10079 G06K7/10435

    Abstract: A method and an apparatus for inspecting radio frequency identification (RFID) tags which utilize a way of shielding for inspecting whether RFID tags function properly or not. The method of the present invention comprises steps of: reading a plurality of RFID tags in a readable zone; and determining whether there is any malfunctional RFID tag in the plurality of RFID tags. If all the plurality of RFID tags function properly, the method will check a next plurality of RFID tags. If there is at least one unreadable RFID tag, the at least one malfunctional RFID tag will be found by shielding one or the plurality of RFID tags. By means of the disclosure in the present invention, the present method and apparatus are capable of improving the efficiency during inspection and simplifying the design of a readable zone.

    Abstract translation: 一种用于检查射频识别(RFID)标签的方法和装置,其利用屏蔽方式来检查RFID标签是否正常工作。 本发明的方法包括以下步骤:读取可读区域中的多个RFID标签; 以及确定所述多个RFID标签中是否存在任何故障的RFID标签。 如果所有多个RFID标签正常工作,则该方法将检查下一个RFID标签。 如果存在至少一个不可读RFID标签,则通过屏蔽一个或多个RFID标签来找到至少一个故障的RFID标签。 通过本发明的公开内容,本发明的方法和装置能够提高检查期间的效率并简化可读区域的设计。

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