Abstract:
A KVM switcher (multi-computer switcher) with integrated parallel transmission, serial peripheral interface (SPI), and universal serial bus (USB), characterized in that signals are transmitted through a parallel transmission interface between a SPI master control unit and at least one USB host interface control unit.
Abstract:
A new and improved wafer support for supporting wafers in a process chamber such as an edge bead removal (EBR) chamber. The wafer support comprises multiple wafer support units each including a gripper block that engages an edge portion or bevel of the wafer. The gripper block is attached to an engaging and disengaging mechanism for selectively causing engagement of the gripper blocks with the wafer to support the wafer and disengagement of the gripper blocks from the wafer to release the wafer for removal of the wafer from the chamber. The gripper blocks contact little or none of the surface area on the patterned surface of the wafer to prevent or substantially reduce the formation of contact-induced defects on the wafer.
Abstract:
A multi-computer (KVM) switcher with ability to extend universal serial bus (USB) host interface via serial peripheral interface (SPI), characterized in that SPI master device interface of master control unit can switch the capability of controlling plural SPI slave devices via serial peripheral interface (SPI), and through installing SPI slave device interfaces on plural universal serial bus (USB) host interface control units to be extended, the object of extending peripheral device with USB interface via SPI interface is achieved.