公开(公告)号：US20230360888A1

公开(公告)日：2023-11-09

申请号：US18023900

申请日：2021-08-20

Applicant: INSTITUT SYSTÉMES INDUSTRIELS, HAUTE ECOLE DE SUISSE OCCIDENTALE, VALAIS-WALLIS (HES-SO) ,  IPRINT INSTITUTE

Inventor： Fritz BIRCHER ,  Christoph ELLERT ,  Alain GERMANIER ,  David MARTINET ,  Gilbert GUGLER ,  Sebastian FILLIGER

IPC: H01J37/32

CPC classification number: H01J37/32366 ,  H01J37/3244 ,  H01J37/32477 ,  H01J37/32568 ,  H01J2237/336

Abstract: Disclosed is a plasma device including at least two plasma cells, and a command unit, wherein the first and the second electrodes of a given plasma cell are independent from the corresponding first and second electrodes of the contiguous plasma cells. The electrodes of contiguous plasma cells are independently connected to the command unit. The command unit includes a high voltage generator and a radiofrequency generator which are mutually protected by a filtering element.