公开(公告)号：US5457529A

公开(公告)日：1995-10-10

申请号：US271447

申请日：1994-07-07

Applicant: Volker Tank ,  Peter Haschberger ,  Burkhard Jansen ,  Erwin Lindermeir ,  Klaus Scheider

Inventor： Volker Tank ,  Peter Haschberger ,  Burkhard Jansen ,  Erwin Lindermeir ,  Klaus Scheider

IPC: G01B9/02 ,  G01J3/453 ,  G01J9/02

CPC classification number: G01J9/02 ,  G01J3/4532

Abstract: In a Michelson interferometer, two plane mirrors of the mirror unit (50) are embodied as two plane mirrors (51, 52) of different sizes, disposed eccentrically and parallel to one another. A hollow shaft (63), rotatably supported in a bearing block (62) and driven by a drive unit (65), is also provided, which is disposed between a beam splitter and the mirror unit (50) and whose axis of rotation (61) coincides with the axis of rotation of the mirror unit (50). The mirror unit (50) is secured to the hollow shaft (63) in such a way that the axis of rotation (61) of the hollow shaft passes through the mirror face of the smaller plane mirror (51), whose axis of rotation forms an acute angle (.beta.) with the vertical to the smaller plane mirror (51), so that the two beams formed at the beam splitter (1) pass, via the tilted mirrors, through the hollow shaft (63) to strike the centrally disposed mirror face of the smaller plane mirror ( 51), are reflected by it to the opposite mirror face of the larger plane mirror (52) and from there to two stationary plane mirrors (71, 72) in such a way that they strike the stationary plane mirrors (71, 72) vertically, and--reflected by those mirrors--take the same path in the opposite direction, recombine at the beam splitter, and are focused by means of an optical element onto a detector (4).

Abstract translation: 在迈克尔逊干涉仪中，反射镜单元（50）的两个平面镜被实施为彼此偏心并平行设置的不同尺寸的两个平面镜（51,52）。 还设置有可旋转地支撑在轴承座（62）中并由驱动单元（65）驱动的中空轴（63），其设置在分束器和反射镜单元（50）之间并且其旋转轴线 61）与镜单元（50）的旋转轴线重合。 镜单元（50）以空心轴的旋转轴线（61）穿过其平面反射镜（51）的镜面（其旋转轴线形成）的方式固定到中空轴 与较小的平面镜（51）垂直的锐角（β），使得形成在分束器（1）处的两个光束经由倾斜反射镜通过空心轴（63）以撞击中心设置 较小的平面镜（51）的镜面被其反射到较大的平面镜（52）的相对的镜面，并从那里反射到两个固定平面镜（71,72），使得它们撞击静止 由这些反射镜垂直和反射的平面镜（71,72）沿相反方向取相同的路径，在分束器处复合，并通过光学元件聚焦到检测器（4）上。