公开(公告)号：US20110115476A1

公开(公告)日：2011-05-19

申请号：US12619405

申请日：2009-11-16

Applicant: Konrad Kapser ,  Arnold Rump

Inventor： Konrad Kapser ,  Arnold Rump

IPC: H01L43/06

CPC classification number: G01R33/0023 ,  G01B7/14 ,  G01R33/0029

Abstract: A system including a sensor circuit and comparison circuitry. The sensor circuit is configured to provide a sensed signal. The comparison circuitry is configured to receive an input signal that corresponds to the sensed signal. The comparison circuitry provides output signals that switch state at different levels of the input signal.

Abstract translation: 一种包括传感器电路和比较电路的系统。 传感器电路被配置为提供感测信号。 比较电路被配置为接收对应于感测信号的输入信号。 比较电路提供在输入信号的不同电平处切换状态的输出信号。

公开(公告)号：US06966224B2

公开(公告)日：2005-11-22

申请号：US10792043

申请日：2004-03-02

Applicant: Hai Yan ,  Roland Burghardt ,  Bernhard Hartmann ,  Konrad Kapser ,  Matthias Rose

Inventor： Hai Yan ,  Roland Burghardt ,  Bernhard Hartmann ,  Konrad Kapser ,  Matthias Rose

IPC: G01C19/5712 ,  G01P9/04

CPC classification number: G01C19/5719 ,  Y10T74/1275

Abstract: Micromachined vibratory gyroscope having two or more coplanar movable masses suspended over a planar substrate. Two perpendicular axes (x and y) are defined within the substrate plane, while a third, the z-axis or input axis, is defined to be perpendicular to the substrate plane. The movements of the two masses along the x-axis are coupled through an electrostatic coupling means so that the natural resonant frequency of the in-phase mode and that of the anti-phase mode are separated from each other for the resonances along the x-axis. When the two masses are driven to vibrate along the x-axis in the anti-phase mode and the device experiences rotation about the z-axis, Coriolis forces act differentially on the masses in the Y-direction, causing the two masses to dither in an anti-phase motion along the y-axis. The anti-phase dithering along the y-axis can be sensed directly by a rate sensor to measure the rate of rotation about the z-axis. Alternatively, the anti-phase dithering of the first and second bodies along the y-axis can be transferred to other movable bodies (i.e., rate-sensing masses) whose movement is then sensed to measure the rate of rotation about the z-axis. The sensing bodies are preferably suspended in such manner that, in the absence of Coriolis forces, the x-axis motion of the vibrating masses does not affect the sensing bodies. That inhibits motion of the sensing bodies in response to linear acceleration within the plane of the substrate, but permits those bodies to respond readily to the Coriolis-induced motion about an axis perpendicular to the substrate plane.

Abstract translation: 微机械振动陀螺仪具有悬挂在平面基板上的两个或更多个共面可移动质量块。 两个垂直轴（x和y）被限定在衬底平面内，而第三个z轴或输入轴被定义为垂直于衬底平面。 沿着x轴的两个质量块的移动通过静电耦合装置耦合，使得同相模式和反相模式的固有谐振频率彼此分离，用于沿x轴的谐振， 轴。 当两个质量被驱动以反相模式沿着x轴振动并且该装置经受围绕z轴的旋转时，科里奥利力在Y方向上的质量作用差异地导致两个质量在 沿y轴的反相运动。 可以通过速率传感器直接感测沿y轴的反相抖动，以测量围绕z轴的旋转速率。 或者，沿着y轴的第一和第二主体的相位抖动可以传递到其它可移动体（即，速率感测质量），其移动然后被感测以测量围绕z轴的旋转速率。 感测体优选地以这样的方式悬挂，即在没有科里奥利力的情况下，振动块的x轴运动不影响感测体。 这可以抑制感测体响应于衬底平面内的线性加速度的运动，但是允许这些物体容易地响应于围绕垂直于衬底平面的轴的科里奥利诱发的运动。

公开(公告)号：US07343801B2

公开(公告)日：2008-03-18

申请号：US10471296

申请日：2002-03-07

Applicant: Konrad Kapser ,  Peter Knittl ,  Ulrich Prechtel ,  Helmut Seidel ,  Sebastian Toelg ,  Manfred Weinacht

Inventor： Konrad Kapser ,  Peter Knittl ,  Ulrich Prechtel ,  Helmut Seidel ,  Sebastian Toelg ,  Manfred Weinacht

IPC: G01P15/125

CPC classification number: F16N11/08 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0831 ,  G01P2015/0834 ,  G01P2015/0845 ,  G01P2015/0857 ,  G01P2015/086

Abstract: A micromechanical capacitive acceleration sensor is described for picking up the acceleration of an object in at least one direction. The sensor includes a frame structure (110), a sensor inertia mass (101) made of a wafer and movably mounted relative to the frame structure (110) about a rotation axis, and a capacitive pick-up unit (120) for producing at least one capacitive output signal representing the position of the sensor mass (101) relative to the frame structure (110). The sensor inertia mass (101) has a center of gravity which offset relative to the rotation axis in a direction perpendicularly to a wafer plane for measuring accelerations laterally to the wafer plane. The sensor mass (101) and the frame structure (110) are made monolithically of one single crystal silicon wafer. A cover section (112) forms a common connector plane (150) for the connection of capacitor electrodes (125,126). Torqueable elements (105) form an electrically conducting bearing device for the sensor mass (101).

Abstract translation: 描述了一种微机电容加速度传感器，用于拾取至少一个方向的物体的加速度。 该传感器包括框架结构（110），由晶片制成的传感器惯性质量块（101），并围绕旋转轴线相对于框架结构（110）可移动地安装;以及电容式拾取单元（120） 表示传感器质量块（101）相对于框架结构（110）的位置的至少一个电容式输出信号。 传感器惯性质量（101）具有垂直于晶片平面的方向相对于旋转轴偏移的重心，用于测量横向于晶片平面的加速度。 传感器质量（101）和框架结构（110）由一个单晶硅晶片制成一体。 盖部分（112）形成用于连接电容器电极（125,126）的公共连接器平面（150）。 扭矩元件（105）形成用于传感器质量块（101）的导电轴承装置。

公开(公告)号：US20060156818A1

公开(公告)日：2006-07-20

申请号：US10471296

申请日：2002-03-07

Applicant: Konrad Kapser ,  Peter Knittl ,  Ulrich Prechtel ,  Helmut Seidel ,  Sebastian Toelg ,  Manfried Weinacht

Inventor： Konrad Kapser ,  Peter Knittl ,  Ulrich Prechtel ,  Helmut Seidel ,  Sebastian Toelg ,  Manfried Weinacht

IPC: G01P15/125

CPC classification number: F16N11/08 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0831 ,  G01P2015/0834 ,  G01P2015/0845 ,  G01P2015/0857 ,  G01P2015/086

Abstract: A micromechanical capacitive acceleration sensor is described for picking up the acceleration of an object in at least one direction. The sensor includes a frame structure (110), a sensor inertia mass (101) made of a wafer and movably mounted relative to the frame structure (110) about a rotation axis, and a capacitive pick-up unit (120) for producing at least one capacitive output signal representing the position of the sensor mass (101) relative to the frame structure (110). The sensor inertia mass (101) has a center of gravity which offset relative to the rotation axis in a direction perpendicularly to a wafer plane for measuring accelerations laterally to the wafer plane. The sensor mass (101) and the frame structure (110) are made monolithically of one single crystal silicon wafer. A cover section (112) forms a common connector plane (150) for the connection of capacitor electrodes (125,126). Torqueable elements (105) form an electrically conducting bearing device for the sensor mass (101).

Abstract translation: 描述了一种微机电容加速度传感器，用于拾取至少一个方向的物体的加速度。 该传感器包括框架结构（110），由晶片制成的传感器惯性质量块（101），并围绕旋转轴线相对于框架结构（110）可移动地安装;以及电容式拾取单元（120） 表示传感器质量块（101）相对于框架结构（110）的位置的至少一个电容式输出信号。 传感器惯性质量（101）具有垂直于晶片平面的方向相对于旋转轴偏移的重心，用于测量横向于晶片平面的加速度。 传感器质量（101）和框架结构（110）由一个单晶硅晶片制成一体。 盖部分（112）形成用于连接电容器电极（125,126）的公共连接器平面（150）。 扭矩元件（105）形成用于传感器质量块（101）的导电轴承装置。

公开(公告)号：US09678168B2

公开(公告)日：2017-06-13

申请号：US12619405

申请日：2009-11-16

Applicant: Konrad Kapser ,  Arnold Rump

Inventor： Konrad Kapser ,  Arnold Rump

IPC: G01B7/14 ,  G01R33/00

CPC classification number: G01R33/0023 ,  G01B7/14 ,  G01R33/0029

Abstract: A system including a sensor circuit and comparison circuitry. The sensor circuit is configured to provide a sensed signal. The comparison circuitry is configured to receive an input signal that corresponds to the sensed signal. The comparison circuitry provides output signals that switch state at different levels of the input signal.

公开(公告)号：US20060021436A1

公开(公告)日：2006-02-02

申请号：US10517808

申请日：2003-06-10

Applicant: Konrad Kapser ,  Ulrich Prechtel ,  Helmut Seidel

Inventor： Konrad Kapser ,  Ulrich Prechtel ,  Helmut Seidel

IPC: G01P15/18 ,  G01P15/02

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/0834 ,  G01P2015/0845 ,  G01P2015/086

Abstract: A multi-axial monolithic acceleration sensor has the following features. The acceleration sensor consists of plural individual sensors with respectively a main sensitivity axis arranged on a common substrate. Each individual sensor is rotatably moveably suspended on two torsion spring elements and has a seismic mass with a center of gravity. Each individual sensor has components that measure the deflection of the seismic mass. The acceleration sensor preferably consists of at least three identical individual sensors. Each individual sensor is suspended eccentrically relative to its center of gravity and is rotated by 90°, 180° or 270° relative to the other individual sensors.

Abstract translation: 多轴单片加速度传感器具有以下特点。 加速度传感器由多个单独的传感器组成，分别具有布置在公共基板上的主灵敏度轴。 每个单独的传感器可旋转地可移动地悬挂在两个扭转弹簧元件上并且具有重心的地震质量。 每个单独的传感器具有测量地震质量的偏转的组件。 加速度传感器优选地由至少三个相同的单独传感器组成。 每个传感器相对于其重心偏心悬挂，并相对于其他单独的传感器旋转90°，180°或270°。