公开(公告)号：US20100037690A1

公开(公告)日：2010-02-18

申请号：US12281699

申请日：2007-03-12

Applicant: Stefan Günthner ,  Bernhard Hartmann

Inventor： Stefan Günthner ,  Bernhard Hartmann

IPC: G01C19/56 ,  H05K3/00

CPC classification number: G01C19/574 ,  G01C19/5712 ,  G01P15/0888 ,  Y10T29/49124

Abstract: A rotational speed sensor including at least one substrate, at least two base elements which each have a frame, a means for suspending the frame from the substrate, at least one seismic mass and one means for suspending the seismic mass from the frame. One or more drive means are provided for driving one or more base elements and one or more reading devices. The at least two base elements are coupled to one another by means of at least one coupling bar.

Abstract translation: 一种旋转速度传感器，包括至少一个基板，至少两个基座元件，每个基座元件具有框架，用于将框架从基板悬挂的装置，至少一个地震块和一个用于将地震质量块悬挂在框架上的装置。 提供一个或多个驱动装置用于驱动一个或多个基本元件和一个或多个读取装置。 所述至少两个基本元件通过至少一个联接杆彼此联接。

公开(公告)号：US20090031806A1

公开(公告)日：2009-02-05

申请号：US12225009

申请日：2007-03-12

Applicant: Bernhard Hartmann ,  Stefan Guenthner

Inventor： Bernhard Hartmann ,  Stefan Guenthner

IPC: G01C19/56 ,  G01P15/00

CPC classification number: G01C19/5762 ,  G01C19/5747

Abstract: The present invention relates to a micromechanical rotational rate sensor with a substrate (9), at least one base element (1) that is suspended by at least one spring element (11, 11′) on the substrate (9), which base element comprises at least one seismic or inertial mass (3), an excitation means (8) and with a read-out arrangement (15). According to the invention, the spring element (11, 11′) is movable perpendicularly to the motion direction (X, Y) of the base element (1).

Abstract translation: 本发明涉及一种具有基板（9）的微机电转速传感器，至少一个由基板（9）上的至少一个弹簧元件（11,11'）悬挂的基体元件（1），该基体元件 包括至少一个地震或惯性质量块（3），激励装置（8）和读出装置（15）。 根据本发明，弹簧元件（11,11'）可垂直于基座元件（1）的运动方向（X，Y）移动。

公开(公告)号：US06483160B2

公开(公告)日：2002-11-19

申请号：US09909030

申请日：2001-07-19

Applicant: Albert Engelhardt ,  Bernhard Hartmann ,  Ulrich Prechtel ,  Helmut Seidel

Inventor： Albert Engelhardt ,  Bernhard Hartmann ,  Ulrich Prechtel ,  Helmut Seidel

IPC: H01L2982

CPC classification number: B81B7/007 ,  B81B2207/097 ,  B81C2203/0109 ,  B81C2203/0118 ,  H01L23/10 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A micromechanical enclosure suitable for micromechanical sensors, particularly acceleration sensors in the field of automotive vehicles, includes a micromechanical structure on a substrate, a conductor track layer connected to the micromechanical structure on the main surface of the substrate, a cover that covers a part of the main surface of the substrate, and a level compensation layer arranged next to the conductor track layer beneath the contact area during the manufacture of the wafer. A planarizing layer, which forms a level surface, may additionally be applied above this, to form a level area on the substrate which can easily be joined to a level area of the cover by means of a metallic wafer bond. This achieves small overall dimensions and avoids a glass frit bond.

Abstract translation: 适用于微机械传感器，特别是机动车辆领域的加速度传感器的微机械罩包括在基板上的微机械结构，在基板的主表面上连接到微机械结构的导体轨道层，覆盖一部分 衬底的主表面，以及在晶片制造期间在接触区域下方布置在导体轨道层旁边的电平补偿层。 形成水平表面的平坦化层可以另外在其上施加，以在衬底上形成能够通过金属晶片接合容易地接合到覆盖层的水平面的水平面。 这实现了小的整体尺寸并且避免了玻璃料粘结。

公开(公告)号：US5377597A

公开(公告)日：1995-01-03

申请号：US052722

申请日：1993-04-26

Applicant: Wolfgang-Dieter Richter ,  Wolfgang David ,  Engelbert Weeger ,  Bernhard Hartmann

Inventor： Wolfgang-Dieter Richter ,  Wolfgang David ,  Engelbert Weeger ,  Bernhard Hartmann

IPC: B61D3/10 ,  B61D17/20 ,  B61D17/00

CPC classification number: B61D17/20 ,  B61D3/10

Abstract: Rail vehicle with at least two car bodies wherein at or near their connecting point a truck is provided which carries both car bodies, wherein furthermore an intermediate link is arranged between the car bodies, and one car body is rotatably mounted at the intermediate link about a lateral axis, and the other car body is rotatably mounted at the intermediate link about a vertical axis.

Abstract translation: 具有至少两个车体的轨道车辆，其中在其连接点处或附近设有卡车，其承载两个车体，此外，中间连杆布置在车体之间，并且一个车体可旋转地安装在中间连杆周围 横向轴线，另一个车体围绕垂直轴线可旋转地安装在中间连杆上。

公开(公告)号：US06966224B2

公开(公告)日：2005-11-22

申请号：US10792043

申请日：2004-03-02

Applicant: Hai Yan ,  Roland Burghardt ,  Bernhard Hartmann ,  Konrad Kapser ,  Matthias Rose

Inventor： Hai Yan ,  Roland Burghardt ,  Bernhard Hartmann ,  Konrad Kapser ,  Matthias Rose

IPC: G01C19/5712 ,  G01P9/04

CPC classification number: G01C19/5719 ,  Y10T74/1275

Abstract: Micromachined vibratory gyroscope having two or more coplanar movable masses suspended over a planar substrate. Two perpendicular axes (x and y) are defined within the substrate plane, while a third, the z-axis or input axis, is defined to be perpendicular to the substrate plane. The movements of the two masses along the x-axis are coupled through an electrostatic coupling means so that the natural resonant frequency of the in-phase mode and that of the anti-phase mode are separated from each other for the resonances along the x-axis. When the two masses are driven to vibrate along the x-axis in the anti-phase mode and the device experiences rotation about the z-axis, Coriolis forces act differentially on the masses in the Y-direction, causing the two masses to dither in an anti-phase motion along the y-axis. The anti-phase dithering along the y-axis can be sensed directly by a rate sensor to measure the rate of rotation about the z-axis. Alternatively, the anti-phase dithering of the first and second bodies along the y-axis can be transferred to other movable bodies (i.e., rate-sensing masses) whose movement is then sensed to measure the rate of rotation about the z-axis. The sensing bodies are preferably suspended in such manner that, in the absence of Coriolis forces, the x-axis motion of the vibrating masses does not affect the sensing bodies. That inhibits motion of the sensing bodies in response to linear acceleration within the plane of the substrate, but permits those bodies to respond readily to the Coriolis-induced motion about an axis perpendicular to the substrate plane.

Abstract translation: 微机械振动陀螺仪具有悬挂在平面基板上的两个或更多个共面可移动质量块。 两个垂直轴（x和y）被限定在衬底平面内，而第三个z轴或输入轴被定义为垂直于衬底平面。 沿着x轴的两个质量块的移动通过静电耦合装置耦合，使得同相模式和反相模式的固有谐振频率彼此分离，用于沿x轴的谐振， 轴。 当两个质量被驱动以反相模式沿着x轴振动并且该装置经受围绕z轴的旋转时，科里奥利力在Y方向上的质量作用差异地导致两个质量在 沿y轴的反相运动。 可以通过速率传感器直接感测沿y轴的反相抖动，以测量围绕z轴的旋转速率。 或者，沿着y轴的第一和第二主体的相位抖动可以传递到其它可移动体（即，速率感测质量），其移动然后被感测以测量围绕z轴的旋转速率。 感测体优选地以这样的方式悬挂，即在没有科里奥利力的情况下，振动块的x轴运动不影响感测体。 这可以抑制感测体响应于衬底平面内的线性加速度的运动，但是允许这些物体容易地响应于围绕垂直于衬底平面的轴的科里奥利诱发的运动。

公开(公告)号：US08261614B2

公开(公告)日：2012-09-11

申请号：US12281699

申请日：2007-03-12

Applicant: Bernhard Hartmann ,  Stefan Günthner

Inventor： Bernhard Hartmann ,  Stefan Günthner

IPC: G01C19/56

CPC classification number: G01C19/574 ,  G01C19/5712 ,  G01P15/0888 ,  Y10T29/49124

Abstract: A rotational speed sensor including at least one substrate, at least two base elements which each have a frame, a means for suspending the frame from the substrate, at least one seismic mass and one means for suspending the seismic mass from the frame. One or more drive means are provided for driving one or more base elements and one or more reading devices. The at least two base elements are coupled to one another by means of at least one coupling bar.

Abstract translation: 一种旋转速度传感器，包括至少一个基板，至少两个基座元件，每个基座元件具有框架，用于将框架从基板悬挂的装置，至少一个地震块和一个用于将地震质量块悬挂在框架上的装置。 提供一个或多个驱动装置用于驱动一个或多个基本元件和一个或多个读取装置。 所述至少两个基本元件通过至少一个联接杆彼此联接。

公开(公告)号：US20080039992A1

公开(公告)日：2008-02-14

申请号：US10592620

申请日：2005-03-16

Applicant: Peter Lohberg ,  Alexander Kolbe ,  Bernhard Hartmann

Inventor： Peter Lohberg ,  Alexander Kolbe ,  Bernhard Hartmann

IPC: G01M17/007 ,  G06F17/00

CPC classification number: G01P15/0888 ,  G01P15/18

Abstract: A sensor arrangement for detecting movements, which is designed as a monolithic arrangement and in which several sensors are integrated. A first sensor is provided to detect a linear acceleration and a second sensor to detect a yaw rate. The sensor arrangement also comprises a third sensor for detecting yaw acceleration.

Abstract translation: 用于检测运动的传感器装置，其被设计为单片布置，并且其中集成有多个传感器。 提供第一传感器以检测线性加速度和第二传感器以检测偏航率。 传感器装置还包括用于检测横摆加速度的第三传感器。

公开(公告)号：US20060121735A1

公开(公告)日：2006-06-08

申请号：US10527789

申请日：2003-09-12

Applicant: Matthias Aikele ,  Albert Engelhardt ,  Marcus Frey ,  Bernhard Hartmann ,  Helmut Seidel

Inventor： Matthias Aikele ,  Albert Engelhardt ,  Marcus Frey ,  Bernhard Hartmann ,  Helmut Seidel

IPC: H01L21/302 ,  H01L21/461

CPC classification number: B81C1/00698 ,  B81B2201/0235 ,  B81B2203/033 ,  B81C2201/0178

Abstract: The invention relates to processes for the formation of isolation structures for micro-machined sensors in single-crystal surface technology. In known processes, silicon structures defined by deep trenches are etched and uncovered by a “release etch” step also at their bottom surface towards the substrate. The subsequent lining of these trenches with a non-conducting insulating material, such as silicon dioxide leads to a firm anchoring by means of a surrounding of the silicon structure with the lined trenches on three sides, leaving one side uncovered. It is the main idea of the invention—instead of lining the trenches—to convert thin-walled silicon into an electrically non-conducting material. This can, for instance, be accomplished by means of a thermal oxidation of narrow silicon ribs released prior thereto by trenches. In the minimal configuration, two trenches (holes) per rib with the required structure depth must be etched for this purpose. The silicon rib between them must be narrow enough to permit its complete thermal through oxidation.

Abstract translation: 本发明涉及用于在单晶表面技术中形成用于微加工传感器的隔离结构的方法。 在已知的工艺中，由深沟槽限定的硅结构通过在其底表面朝向衬底的“释放蚀刻”步骤被蚀刻和未覆盖。 这些具有非导电绝缘材料（例如二氧化硅）的这些沟槽的后续衬里导致通过硅结构的周围与三面沟槽在三面上的牢固锚定，留下一侧未覆盖。 本发明的主要思想是将薄壁硅转化为非导电材料，而不是将沟槽衬里。 这可以例如通过在其之前通过沟槽释放的窄硅肋的热氧化来实现。 在最小的构造中，为了这个目的，必须蚀刻每个具有所需结构深度的肋的两个沟槽（孔）。 它们之间的硅筋必须足够窄以使其完全通过热氧化。

公开(公告)号：US20080276706A1

公开(公告)日：2008-11-13

申请号：US11663894

申请日：2005-09-27

Applicant: Bernhard Hartmann ,  Konrad Kasper ,  Reinhard Gottinger ,  Stefan Gunthner

Inventor： Bernhard Hartmann ,  Konrad Kasper ,  Reinhard Gottinger ,  Stefan Gunthner

IPC: G01C19/50

CPC classification number: G01C19/5747

Abstract: Disclosed is a rotational rate sensor with a substrate, at least one basic element (1) which comprises a frame (2), a suspension (7) of the frame (2) on the substrate, at least one vibration facility (3) and a suspension (4, 5) of the vibration facility (3) on the frame (2), a drive device (8) and a reading facility (9, 10). The drive device (8) is designed in such a manner that it acts on the frame (2) of the basic element (1).

Abstract translation: 公开了一种具有基底的旋转速率传感器，至少一个基本元件（1），其包括框架（2），基底上的框架（2）的悬架（7），至少一个振动设备（3）和 在框架（2）上的振动设备（3）的悬架（4,5），驱动装置（8）和读取装置（9,10）。 驱动装置（8）被设计成使其作用在基本元件（1）的框架（2）上。