公开(公告)号：US10199202B2

公开(公告)日：2019-02-05

申请号：US15564407

申请日：2015-04-09

Applicant: Oral 28 Inc.

Inventor： Toyohiko Shindo ,  Yumino Genba ,  Masuji Yamaguchi

IPC: A01C1/00 ,  H01J37/32 ,  B01J19/08 ,  C01B33/12 ,  A61C5/77 ,  H05H1/24 ,  H05H1/42

Abstract: Provided are a plasma irradiation apparatus and plasma irradiation method capable of converting a silica precursor to a high quality silica film in a short time without thermal effects on the object being processed. This plasma irradiation apparatus 1 is provided with a plasma-generating unit 12 and an irradiation unit 80 for irradiating the plasma generated by the plasma-generating unit 12 on an object to be processed, and is characterized in that irradiation unit 80 comprises a coating part 85 capable of coating a liquid on the object being processed.

公开(公告)号：US20180138019A1

公开(公告)日：2018-05-17

申请号：US15564407

申请日：2015-04-09

Applicant: ORAL 28 INC.

Inventor： Toyohiko SHINDO ,  Yumino GENBA ,  Masuji YAMAGUCHI

IPC: H01J37/32 ,  A61C5/77 ,  B01J19/08 ,  C01B33/12

CPC classification number: H01J37/32366 ,  A61C5/77 ,  B01J19/08 ,  B01J19/088 ,  B01J2219/0879 ,  B01J2219/0894 ,  C01B33/12 ,  H01J37/3244 ,  H01J37/32807 ,  H01J2237/332 ,  H05H1/2406 ,  H05H1/42 ,  H05H2001/2456 ,  H05H2245/122 ,  H05H2245/125 ,  H05H2277/10

Abstract: Provided are a plasma irradiation apparatus and plasma irradiation method capable of converting a silica precursor to a high quality silica film in a short time without thermal effects on the object being processed. This plasma irradiation apparatus 1 is provided with a plasma-generating unit 12 and an irradiation unit 80 for irradiating the plasma generated by the plasma-generating unit 12 on an object to be processed, and is characterized in that said irradiation unit 80 comprises a coating part 85 capable of coating a liquid on the object being processed.