公开(公告)号：US20060164642A1

公开(公告)日：2006-07-27

申请号：US10518121

申请日：2003-06-16

Applicant: Pascal Amary ,  Ramdane Benferhat ,  Francois Bos ,  Denis Cattelan

Inventor： Pascal Amary ,  Ramdane Benferhat ,  Francois Bos ,  Denis Cattelan

IPC: G01J4/00

CPC classification number: G01J4/00 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214

Abstract: The invention concerns an achromatic spectroscopic ellipsometer for analysing small regions of a sample (1) over a wide range of wavelengths from ultraviolet (UV) to infrared (IR). The spectroscopic ellipsometer contains a light source (2) emitting a light beam (3). The light beam (3) goes through a polarisation state generator section (4) before being focused at an incidence angle q by a first parabolic mirror (5) to a small spot on sample (1). A second parabolic mirror (6) collects the reflected beam (16) and connects said beam to an analysing section (7). The reflected beam (16) emerges from the analysing section (7) to go to means (8) for detecting and analysing a spectroscopically said beam. According to the invention, the light beam (3) through the polarisation state generator section (4) up to the first parabolic mirror (5) and the light beam from the second mirror (6) through the analysing section (7) are parallel enabling achromatism. The incidence angle q is largely varied without shifting of the location of the small spot on the sample surface.

Abstract translation: 本发明涉及一种用于分析从紫外（UV）到红外（IR）的宽波长范围内的样品（1）的小区域的消色差分光椭偏仪。 光谱椭偏仪包含发射光束（3）的光源（2）。 在通过第一抛物面镜（5）以入射角q聚焦到样品（1）上的小斑点之前，光束（3）经过偏振态发生器部分（4）。 第二抛物面镜（6）收集反射光束（16）并将所述光束连接到分析部分（7）。 反射光束（16）从分析部分（7）出射，以转到用于检测和分析光谱的所述光束的装置（8）。 根据本发明，通过偏振态发生器部分（4）直到第一抛物面反射镜（5）的光束（3）和来自第二反射镜（6）的光束通过分析部分（7）并联使能 消色差 入射角q大大地变化，而不会移动样品表面上的小斑点的位置。

公开(公告)号：US20100110427A1

公开(公告)日：2010-05-06

申请号：US12523417

申请日：2008-01-18

Applicant: Pascal Amary ,  Ramdane Benferhat ,  Denis Cattelan

Inventor： Pascal Amary ,  Ramdane Benferhat ,  Denis Cattelan

IPC: G01J3/28 ,  G01J4/00 ,  G01N21/21

CPC classification number: G01N21/211 ,  G01J3/2823 ,  G01J4/04 ,  G01N2021/213

Abstract: A system and process for analyzing a sample includes an excitation section and an analyze section, said excitation section including a light source emitting an incident measurement luminous beam, a polarisation state generator (PSG), first optics, and said analyze section includes a polarisation state analyzer (PSA), a detection system and second optics. The excitation section includes an illumination source emitting an incident visualization luminous beam, superposition optics that direct the incident visualization luminous beam toward the sample surface along an optical axis which is identical to the optical axis of the incident measurement luminous beam and the analyze section includes separation optics that transmit a part of the reflected or transmitted visualization luminous beam and a part of the reflected or transmitted measurement luminous beam towards a visualization direction.

Abstract translation: 用于分析样本的系统和过程包括激励部分和分析部分，所述激励部分包括发射入射测量光束的光源，偏振状态发生器（PSG），第一光学器件，并且所述分析部分包括偏振状态 分析仪（PSA），检测系统和第二光学器件。 励磁部分包括发射入射可视化发光束的照明源，将入射的可视化发光束沿着与入射测量光束的光轴相同的光轴朝向样本表面的叠加光学器件，分析部分包括分离 将反射或透射的可视化发光束的一部分和反射或透射的测量发光束的一部分朝向可视化方向透射的光学器件。

公开(公告)号：US07184145B2

公开(公告)日：2007-02-27

申请号：US10518121

申请日：2003-06-16

Applicant: Pascal Amary ,  Ramdane Benferhat ,  Francis Bos ,  Denis Cattelan

Inventor： Pascal Amary ,  Ramdane Benferhat ,  Francis Bos ,  Denis Cattelan

IPC: G01J4/00

CPC classification number: G01J4/00 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214

Abstract: Disclosed is an achromatic spectroscopic ellispometer for analyzing small regions of a sample over a wide range of wavelengths from ultraviolet (UV) to infrared (IR). The spectroscopic ellipsometer contains a light source emitting a light beam which passes through a polarisation state generator section before being focused at an incidence angle q by a first parabolic mirror to a small spot on a sample. A second parabolic mirror collects the reflected beam and connects said beam to an analyzing section. The reflected beam emerges from the analyzing section and is spectroscopically detected and analyzed. The light beam through the polarisation state generator section up to the first parabolic mirror and the light beam from the second mirror through the analyzing section are parallel enabling achromatism. The incidence angle q is largely varied without shifting of the location of the small spot on the sample surface.

Abstract translation: 公开了一种用于分析从紫外（UV）到红外（IR）的宽波长范围内的样品的小区域的消色差光谱椭圆计。 光谱椭偏仪包含发射光束的光源，该光束在以入射角q被第一抛物面镜聚焦到样品上的小斑点之前通过偏振态发生器部分。 第二抛物面镜收集反射光束并将所述光束连接到分析部分。 反射光束从分析部分出射，并进行光谱检测和分析。 通过偏振状态发生器部分直到第一抛物面镜的光束和来自第二反射镜的通过分析部分的光束是平行的，使得能够消色差。 入射角q大大地变化，而不会移动样品表面上的小斑点的位置。

公开(公告)号：US08310675B2

公开(公告)日：2012-11-13

申请号：US12523417

申请日：2008-01-18

Applicant: Pascal Amary ,  Ramdane Benferhat ,  Denis Cattelan

Inventor： Pascal Amary ,  Ramdane Benferhat ,  Denis Cattelan

IPC: G01J4/00

CPC classification number: G01N21/211 ,  G01J3/2823 ,  G01J4/04 ,  G01N2021/213

Abstract: A system and process for analyzing a sample includes an excitation section and an analyze section, said excitation section including a light source emitting an incident measurement luminous beam, a polarization state generator (PSG), first optics, and said analyze section includes a polarization state analyzer (PSA), a detection system and second optics. The excitation section includes an illumination source emitting an incident visualization luminous beam, superposition optics that direct the incident visualization luminous beam toward the sample surface along an optical axis which is identical to the optical axis of the incident measurement luminous beam and the analyze section includes separation optics that transmit a part of the reflected or transmitted visualization luminous beam and a part of the reflected or transmitted measurement luminous beam towards a visualization direction.

Abstract translation: 用于分析样本的系统和过程包括激励部分和分析部分，所述激励部分包括发射入射测量光束的光源，偏振状态发生器（PSG），第一光学器件，并且所述分析部分包括偏振状态 分析仪（PSA），检测系统和第二光学器件。 励磁部分包括发射入射可视化发光束的照明源，将入射的可视化发光束沿着与入射测量光束的光轴相同的光轴朝向样本表面的叠加光学器件，分析部分包括分离 将反射或透射的可视化发光束的一部分和反射或透射的测量发光束的一部分朝向可视化方向透射的光学器件。