公开(公告)号：US20090272200A1

公开(公告)日：2009-11-05

申请号：US12306012

申请日：2007-06-15

Applicant: Roman Frahnow ,  Arno Steckenborn

Inventor： Roman Frahnow ,  Arno Steckenborn

IPC: G01F1/80

CPC classification number: G01F1/8495 ,  B81B3/0032 ,  B81B2201/0292 ,  B81B2201/058 ,  G01F1/8445 ,  G01F1/8477

Abstract: In a micromechanical sensor (11) for measuring a mass flow rate in accordance with the Coriolis principle, two line sections (13) are mounted in a suspension means (24) such that they can oscillate, as a result of which they can be caused to oscillate in phase opposition (essential for the measuring principle). A spacer layer (18) is provided between the layers (12a, 12b) forming the line sections (13), the spacer layer ensuring that there is a space between the line sections (13) in the quiescent state. Oscillation of the line sections in phase opposition only becomes possible at all as a result of this since this prevents collision of the line sections (13) as they approach one another.

Abstract translation: 在用于根据科里奥利原理测量质量流量的微机械传感器（11）中，两个线段（13）安装在悬挂装置（24）中，使得它们可以振荡，结果可能导致它们 以相反的方式振荡（对测量原理至关重要）。 间隔层（18）设置在形成线路段（13）的层（12a，12b）之间，间隔层确保在静止状态下的线段（13）之间存在空间。 因此，由于这样可以防止线路部分（13）在彼此接近时发生碰撞，所以相位相反的线路部分的振荡完全是可能的。

公开(公告)号：US07874219B2

公开(公告)日：2011-01-25

申请号：US12306012

申请日：2007-06-15

Applicant: Roman Frahnow ,  Arno Steckenborn

Inventor： Roman Frahnow ,  Arno Steckenborn

IPC: G01F1/84

CPC classification number: G01F1/8495 ,  B81B3/0032 ,  B81B2201/0292 ,  B81B2201/058 ,  G01F1/8445 ,  G01F1/8477

Abstract: In a micromechanical sensor (11) for measuring a mass flow rate in accordance with the Coriolis principle, two line sections (13) are mounted in a suspension means (24) such that they can oscillate, as a result of which they can be caused to oscillate in phase opposition (essential for the measuring principle). A spacer layer (18) is provided between the layers (12a, 12b) forming the line sections (13), the spacer layer ensuring that there is a space between the line sections (13) in the quiescent state. Oscillation of the line sections in phase opposition only becomes possible at all as a result of this since this prevents collision of the line sections (13) as they approach one another.

Abstract translation: 在用于根据科里奥利原理测量质量流量的微机械传感器（11）中，两个线段（13）安装在悬挂装置（24）中，使得它们可以振荡，结果可能导致它们 以相反的方式振荡（对测量原理至关重要）。 间隔层（18）设置在形成线路段（13）的层（12a，12b）之间，间隔层确保在静止状态下的线段（13）之间存在空间。 因此，由于这样可以防止线路部分（13）在彼此接近时发生碰撞，所以相位相反的线路部分的振荡完全是可能的。