Yield based, in-line defect sampling method
    1.
    发明授权
    Yield based, in-line defect sampling method 失效
    基于收益率的在线缺陷抽样方法

    公开(公告)号:US06613590B2

    公开(公告)日:2003-09-02

    申请号:US09847708

    申请日:2001-05-02

    CPC classification number: H01L22/20 Y02P80/30

    Abstract: A test method provides a sample of wafer level defects most likely to cause yield loss on a semiconductor wafer subdivided into a plurality of integrated circuits (IC's). Defect size and location data from an inspection tool is manipulated in an algorithm based on defect sizes and geometry parameters. The defects are classified by defect size to form size based populations. The contribution of each size range of defect population to yield loss is calculated and random samples for review are selected from each defect size population. The number of samples from each size defect population is proportional to the predicted yield impact of each sample. The method is rapid and permits on-line process modification to reduce yield losses.

    Abstract translation: 一种测试方法提供了在分成多个集成电路(IC))的半导体晶片上最可能导致屈服损失的晶片级缺陷的样本。 基于缺陷尺寸和几何参数的算法来操纵来自检查工具的缺陷尺寸和位置数据。 缺陷根据缺陷大小分类以形成基于大小的群体。 计算每个尺寸范围的缺陷种群对产量损失的贡献,并从每个缺陷大小的群体中选择随机抽样样本。 来自每个大小缺陷种群的样品数量与每个样品的预测产量影响成比例。 该方法快速,允许在线过程修改以减少产量损失。

    Die loss estimation using universal in-line metric (UILM)
    2.
    发明授权
    Die loss estimation using universal in-line metric (UILM) 失效
    使用通用在线度量(UILM)的损耗估计

    公开(公告)号:US07485548B2

    公开(公告)日:2009-02-03

    申请号:US11276719

    申请日:2006-03-10

    CPC classification number: H01L21/67288

    Abstract: A system predicts die loss for a semiconductor wafer by using a method referred to as universal in-line metric (UILM). A wafer inspection tool detects defects on the wafer and identifies the defects by various defect types. The UILM method applies to various ways of classification of the defect types and takes into account the impact of each defect type on the die loss.

    Abstract translation: 系统通过使用称为通用在线度量(UILM)的方法来预测半导体晶片的晶粒损耗。 晶片检查工具检测晶片上的缺陷,并通过各种缺陷类型识别缺陷。 UILM方法适用于缺陷类型的各种分类方法,并考虑到每种缺陷类型对模具损耗的影响。

    Yield based, in-line defect sampling method
    3.
    发明授权
    Yield based, in-line defect sampling method 有权
    基于收益率的在线缺陷抽样方法

    公开(公告)号:US06265232B1

    公开(公告)日:2001-07-24

    申请号:US09138295

    申请日:1998-08-21

    CPC classification number: H01L22/20 Y02P80/30

    Abstract: A test method provides a sample of wafer level defects most likely to cause yield loss on a semiconductor wafer subdivided into a plurality of integrated circuits (IC's). Defect size and location data from an inspection tool is manipulated in an algorithm based on defect sizes and geometry parameters. The defects are classified by defect size to form size based populations The contribution of each size range of defect population to yield loss is calculated and random samples for review are selected from each defect size population. The number of samples from each size defect population is proportional to the predicted yield impact of each sample. The method is rapid and permits on-line process modification to reduce yield losses.

    Abstract translation: 一种测试方法提供了在分成多个集成电路(IC))的半导体晶片上最可能导致屈服损失的晶片级缺陷的样本。 基于缺陷尺寸和几何参数的算法来操纵来自检查工具的缺陷尺寸和位置数据。 缺陷根据缺陷大小分类以形成基于大小的群体。计算缺陷群体的每个大小范围对产量损失的贡献,并从每个缺陷大小群体中选择用于审查的随机样本。 来自每个大小缺陷种群的样品数量与每个样品的预测产量影响成比例。 该方法快速,允许在线过程修改以减少产量损失。

    Yield based, in-line defect sampling method
    4.
    发明授权
    Yield based, in-line defect sampling method 失效
    基于收益率的在线缺陷抽样方法

    公开(公告)号:US06890775B2

    公开(公告)日:2005-05-10

    申请号:US10651665

    申请日:2003-08-29

    CPC classification number: H01L22/20 Y02P80/30

    Abstract: A test method provides a sample of wafer level defects most likely to cause yield loss on a semiconductor wafer subdivided into a plurality of integrated circuits (ICs). Defect size and location data from an inspection tool is manipulated in an algorithm based on defect sizes and geometry parameters. The defects are classified by defect size to form size based populations. The contribution of each size range of defect population to yield loss is calculated and random samples for review are selected from each defect size population. The number of samples from each size defect population is proportional to the predicted yield impact of each sample. The method is rapid and permits on-line process modification to reduce yield losses.

    Abstract translation: 测试方法提供在细分为多个集成电路(IC)的半导体晶片上最可能导致产量损失的晶片级缺陷的样本。 基于缺陷尺寸和几何参数的算法来操纵来自检查工具的缺陷尺寸和位置数据。 缺陷根据缺陷大小分类以形成基于大小的群体。 计算每个尺寸范围的缺陷种群对产量损失的贡献,并从每个缺陷大小的群体中选择随机抽样样本。 来自每个大小缺陷种群的样品数量与每个样品的预测产量影响成比例。 该方法快速,允许在线过程修改以减少产量损失。

    Combination scraper and keycase
    5.
    发明授权
    Combination scraper and keycase 失效
    组合刮刀和钥匙盒

    公开(公告)号:US4481690A

    公开(公告)日:1984-11-13

    申请号:US481726

    申请日:1983-04-04

    CPC classification number: A45C11/32 A45C11/321 A45C15/00 A47L13/08 B60S3/045

    Abstract: A combination scraper and keycase having a hollow body providing a compartment for keys, coins or the like and a pair of blades swingably mounted on the body for movement between positions housed in the body and extended operable positions in which the blade cooperatively forms an elongated scraping edge.

    Abstract translation: 具有中空主体的组合刮刀和钥匙盒,其提供用于钥匙,硬币等的隔间,以及一对可摆动地安装在主体上用于在容纳在主体中的位置之间移动的刀片和延伸的可操作位置,其中刀片协同地形成细长刮擦 边缘。

    Use of Nucleic Acid Probes to Detect Nucleotide Sequences of Interest in a Sample
    6.
    发明申请
    Use of Nucleic Acid Probes to Detect Nucleotide Sequences of Interest in a Sample 审中-公开
    使用核酸探针检测样品中感兴趣的核苷酸序列

    公开(公告)号:US20090203017A1

    公开(公告)日:2009-08-13

    申请号:US12359263

    申请日:2009-01-23

    CPC classification number: C12Q1/6816 C12Q2563/107 C12Q2521/301

    Abstract: The invention relates to methods for the determination and detection of nucleic acids sequences in a sample. The nucleic acid may be RNA or DNA or both. The invention also relates to methods for the determination of the presence and species of various microorganisms in a sample. We have also identified a set of oligonucleotide nucleic acid sequences within the rRNAs of Gram-negative organisms that facilitates both the broad identification of Gram-negative organisms as a class when used as a pool, or in combination, for example in a hybridization assay. This set of oligonucleotides may detect sequences that are indicative of the presence of organisms of the broad class of Gram-negative organisms while exhibiting little or no false identification of Gram-positive organisms, and fungi, or other microorganisms. The assay includes concurrent incubation with at least one nucleotide sequence of interest, at least one nucleic acid probe, a fluorosurfactant, and a nuclease. The assay may further be employed to detect the presence of bacteria, fungi, or other microorganisms by use of additional specific probes, or to detect and/or identify target nucleic acid sequences in a sample. Further, the invention also relates to methods of reducing non-specific binding and facilitating complex formation in a binding assay. The binding assay may be, but is not limited to, a nucleic acid hybridization assay or an immunoassay. The invention also relates to methods of detection that employ at least one target of interest, which may be a nucleotide sequence, at least one probe, which may be a nucleic acid probe and a nuclease.

    Abstract translation: 本发明涉及用于测定和检测样品中核酸序列的方法。 核酸可以是RNA或DNA或两者。 本发明还涉及用于确定样品中各种微生物的存在和种类的方法。 我们还在革兰氏阴性生物体的rRNAs中鉴定了一组寡核苷酸核酸序列,当用作池或组合使用时,例如在杂交测定中,可以广泛鉴定革兰氏阴性生物体。 这组寡核苷酸可以检测指示广泛类型的革兰氏阴性生物体的生物体的存在的序列,同时表现出对革兰氏阳性生物体,真菌或其它微生物的很少或没有虚假的鉴定。 该测定包括与至少一个目的核苷酸序列,至少一个核酸探针,含氟表面活性剂和核酸酶的同时孵育。 该测定法还可用于通过使用另外的特异性探针来检测细菌,真菌或其它微生物的存在,或检测和/或鉴定样品中的靶核酸序列。 此外,本发明还涉及减少非特异性结合并促进结合测定中复合物形成的方法。 结合测定可以是但不限于核酸杂交测定或免疫测定。 本发明还涉及使用至少一种感兴趣靶标(其可以是核苷酸序列)的至少一种探针,其可以是核酸探针和核酸酶的检测方法。

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