公开(公告)号：US08030507B2

公开(公告)日：2011-10-04

申请号：US12407526

申请日：2009-03-19

Applicant: Chang Gyoun Kim ,  Taek-Mo Chung ,  Young Kuk Lee ,  Ki-Seok An ,  Sun Sook Lee ,  Beyong Hwan Ryu ,  Se Jin Jang

Inventor： Chang Gyoun Kim ,  Taek-Mo Chung ,  Young Kuk Lee ,  Ki-Seok An ,  Sun Sook Lee ,  Beyong Hwan Ryu ,  Se Jin Jang

IPC: C07F7/22

CPC classification number: C07F7/2204

Abstract: The present invention relates to novel tin amino-alkoxide complexes and a method for preparing the same, precisely novel tin amino-alkoxide complexes represented by formula 1 and useful as a precursor for tin and tin oxide thin films and a precursor for the production of nano-sized tin and tin oxide particles and a method for preparing the same. In formula 1, A is linear or branched (C2-C10) alkylene substituted or not substituted with halogen; R1 and R2 are independently linear or branched (C1-C7) alkyl substituted or not substituted with halogen. Sn[O-A-NR1R2]2  [Formula 1]

Abstract translation: 本发明涉及新的锡氨基 - 烷氧化物络合物及其制备方法，精细新型的由式1表示的锡氨基 - 醇盐络合物，可用作锡和锡氧化物薄膜的前体和用于生产纳米粒子的前体 锡和锡氧化物颗粒及其制备方法。 在式1中，A是被卤素取代或未被取代的直链或支链（C2-C10）亚烷基; R1和R2独立地是被卤素取代或未被取代的直链或支链（C1-C7）烷基。 Sn [O-A-NR1R2] 2 [式1]

公开(公告)号：US20090275770A1

公开(公告)日：2009-11-05

申请号：US12407526

申请日：2009-03-19

Applicant: Chang Gyoun KIM ,  Taek-Mo CHUNG ,  Young Kuk LEE ,  Ki-Seok AN ,  Sun Sook LEE ,  Beyong Hwan RYU ,  Se Jin JANG

Inventor： Chang Gyoun KIM ,  Taek-Mo CHUNG ,  Young Kuk LEE ,  Ki-Seok AN ,  Sun Sook LEE ,  Beyong Hwan RYU ,  Se Jin JANG

IPC: C07F7/22

CPC classification number: C07F7/2204

Abstract: The present invention relates to novel tin amino-alkoxide complexes and a method for preparing the same, precisely novel tin amino-alkoxide complexes represented by formula 1 and useful as a precursor for tin and tin oxide thin films and a precursor for the production of nano-sized tin and tin oxide particles and a method for preparing the same. In formula 1, A is linear or branched (C2-C10) alkylene substituted or not substituted with halogen; R1 and R2 are independently linear or branched (C1-C7) alkyl substituted or not substituted with halogen. Sn[O-A-NR1R2]2  [Formula 1]

Abstract translation: 本发明涉及新的锡氨基 - 烷氧化物络合物及其制备方法，精细新型的由式1表示的锡氨基 - 醇盐络合物，可用作锡和锡氧化物薄膜的前体和用于生产纳米粒子的前体 锡和锡氧化物颗粒及其制备方法。 在式1中，A是被卤素取代或未被取代的直链或支链（C2-C10）亚烷基; R1和R2独立地是被卤素取代或未被取代的直链或支链（C1-C7）烷基。 Sn [O-A-NR1R2] 2 [式1]

公开(公告)号：US06483068B2

公开(公告)日：2002-11-19

申请号：US09767260

申请日：2001-01-23

Applicant: Se-Jin Jang

Inventor： Se-Jin Jang

IPC: F27D1100

CPC classification number: H01L21/67115

Abstract: A hard baking apparatus which is capable of evenly heating a semiconductor substrate when a photoresist pattern of the semiconductor substrate is hard baked. The apparatus for hard baking a photoresist pattern including: a chamber; a chuck installed at a lower portion in the chamber on which a semiconductor substrate is mounted; a heating unit installed at an upper portion in the chamber; and a unit installed at a lower portion of the heating unit for evenly distributing light.