Abstract:
A batch type apparatus may include a tube; a boat configured to receive a plurality of semiconductor substrates, the boat vertically moved into the tube; a gas nozzle vertically arranged in the tube, the tube having a first portion and a second portion upwardly extended from the first portion; a gas pipe for supplying reaction gases to the gas nozzle, the gas pipe having a horizontal extension and a vertical extension, and the vertical extension extended in the gas nozzle; a fixing member for fixing the first portion of the gas nozzle to the gas pipe, the fixing member having strength higher than that of the gas nozzle; and a clamping member for clamping the gas pipe to the tube. Therefore, breakage of the gas nozzle may be suppressed.
Abstract:
A substrate support apparatus includes an upper plate supporting a substrate, a lower plate disposed under the upper plate, an insulating member interposed between the upper plate and the lower plate, an electrode interposed between the upper plate and the insulating member to direct plasma onto the substrate supported by the upper plate, and a heater interposed between the insulating member and the lower plate to heat the substrate supported by the upper plate. The insulating member includes a material having a volume resistance greater than or equal to about 106 Ω-cm at a temperature of about 400° C. to about 800° C. so as to reduce a leakage current between the heater and the electrode.
Abstract:
A ceramic heater capable of reducing power consumption, a method of manufacturing the ceramic heater and an apparatus for forming a thin layer having the ceramic heater are disclosed. The ceramic heater includes a plate, a first heating layer, a second heating layer and a connecting member. The first and second heater layers are disposed parallel to each other within the plate. The connecting member includes a ceramic material having a negative temperature coefficient (NTC) to electrically connect the first heating layer with the second heating layer at a temperature higher than a predetermined target temperature.
Abstract:
A bearing assembly includes a spherical journal and a hemispherical bearing that is made of a fiber reinforced composite and has a bearing surface for establishing a spherical pair with the spherical journal. The fiber reinforced composite can be constructed by arranging a uni-directional prepreg, woven fiber prepregs and staple-fiber prepregs in a variety of configurations, and thermoplastic resin particles or self-lubrication particles are uniformly provided on the bearing surface. It is possible to alleviate stress concentration generated on the bearing surface by forming a plurality of air channels capable of imparting directivity on an outer surface of the hemispherical bearing.
Abstract:
Provided is a hetero-junction membrane including: a first layer comprising first nanoparticles of a first conductive type; and a second layer comprising second nanoparticles of a second conductive type, wherein the first layer and the second layer are joined to each other. The hetero-junction membrane has advantages in that actuating efficiency is much higher, the direction of actuating can be predicted and the manufacturing processes are simple compared to conventional bucky paper formed of a single layer.
Abstract:
The present invention discloses a bearing assembly capable of assuring mechanical strength and reducing a friction coefficient and stress concentration, and a method for manufacturing the same. The present invention comprises a spherical journal and a hemispherical bearing that is made of a fiber reinforced composite and has a bearing surface for establishing a spherical pair with the spherical journal. The fiber reinforced composite can be constructed by arranging a uni-directional prepreg, woven fiber prepregs and staple-fiber prepregs in a variety of configurations, and thermoplastic resin particles or self-lubrication particles are uniformly provided on the bearing surface. It is possible to alleviate stress concentration generated on the bearing surface by forming a plurality of air channels capable of imparting directivity on an outer surface of the hemispherical bearing.
Abstract:
A semiconductor wafer having an active surface separated into device regions with semiconductor chips formed thereon and scribe regions formed between the device regions. The wafer includes an insulating layer formed on the active surface in the device regions. The insulating layer has a first edge and a second edge oriented in a confronting relationship. The first edge and the second edge end at the scribe regions.
Abstract:
A semiconductor chip packaging device includes a lead frame electrically connected to the chip and mechanically supporting the chip; a metal layer guard ring formed along at least one peripheral edge of an active surface of the chip; at least one slit formed at corner parts of the chip; a passivation layer covering the metal layer guard ring, the chip and the lead frame; and a package body made of a molding resin encapsulating the passivation layer, the lead frame, the metal layer and the chip; the metal layer guard ring being chamfered or rounded at corner parts of the chip to reduce shear stresses at the corner parts of the chip.
Abstract:
A bonding pad in a semiconductor device having at least one slit is provided. In the semiconductor device including a passivation layer covering the bonding pad and metal wiring, at least one slit is formed on the bonding pad for electrically connecting the metal wiring to external leads of the semiconductor device. The slit formed in the bonding pad may be filled with a molding compound to buffer the stresses caused by a wire-bonding process. Hence, stress-induced corrosion may be reduced and PCT reliability may be enhanced.
Abstract:
A plasma display panel includes first and second substrates opposite to each other; a plurality of address electrodes disposed on one surface of the first substrate; a plurality of display electrodes disposed in a perpendicular direction to the address electrodes on one surface of the second substrate; and red, green, and blue phosphor layers disposed in a discharge space between the first and second substrates. At least one of the phosphor layers include a phosphor coated with a metal.