公开(公告)号：US5225884A

公开(公告)日：1993-07-06

申请号：US716667

申请日：1991-06-05

Applicant: Steven A. Stark ,  David Shen

Inventor： Steven A. Stark ,  David Shen

IPC: G01J11/00 ,  G01J1/02 ,  G01J1/18 ,  G01J1/42

CPC classification number: G01J1/02 ,  G01J1/0271 ,  G01J1/42 ,  G01J1/4257 ,  G01J11/00 ,  G01J2001/0285 ,  G01J2001/184 ,  G01J2001/4238

Abstract: System and method for analyzing pulses from an excimer laser by measuring light energy rather than heat energy. The output of the laser is monitored with a photodetector to provide electrical current pulses corresponding to the intensity of the light in individual ones of the laser pulses. The current pulses are integrated to provide voltages corresponding to the light energy of the laser pulses, and the voltages are converted to digital signals. The digital signals are accumulated during the exposure period to determine the total light energy of the pulses during that period and also during a shorter interval of time during the exposure period. The light energy for the interval is divided by the length of the interval to determine the average intensity of the pulses during the interval. Displays are provided for the light energy and the intensity of the pulses, as well as the length of the exposure period.

Abstract translation: 通过测量光能而不是热能来分析来自准分子激光器的脉冲的系统和方法。 用光电检测器监测激光器的输出，以提供与各个激光脉冲中的光的强度对应的电流脉冲。 电流脉冲被积分以提供与激光脉冲的光能相对应的电压，并将电压转换成数字信号。 数字信号在曝光期间被累积，以确定该期间脉冲的总光能以及曝光期间较短的时间间隔期间的总光能。 将间隔的光能除以间隔的长度，以确定间隔期间脉冲的平均强度。 提供了用于光能和脉冲强度的显示以及曝光周期的长度。