公开(公告)号：US11862112B2

公开(公告)日：2024-01-02

申请号：US16850327

申请日：2020-04-16

Applicant: STMicroelectronics (Grenoble 2) SAS

Inventor： David Maucotel

IPC: G01J1/42 ,  G01J1/02 ,  G09G5/10 ,  G09G3/34

CPC classification number: G09G3/3406 ,  G09G5/10 ,  G01J2001/4238 ,  G09G2320/0626 ,  G09G2360/144

Abstract: An electronic system includes a control circuit to provide a binary control signal alternating between a first binary state during first phases and a second binary state during second phases; a screen controlled by the control signal, the screen emitting light during each first phase, and to not emit any light during each second phase; a light sensor under the screen or along the edge of the screen, and providing a measurement signal representative of a quantity of light received by the sensor during a measurement phase or a plurality of consecutive measurement phases; and a synchronization device to synchronize each measurement phase with a second phase.

公开(公告)号：US09894728B2

公开(公告)日：2018-02-13

申请号：US15039101

申请日：2014-11-25

Applicant: RENSSELAER POLYTECHNIC INSTITUTE

Inventor： Michael Shur ,  Anqing Liu

IPC: H05B37/02 ,  H05B33/08 ,  G01J3/50 ,  G01J1/42 ,  G03B15/02

CPC classification number: H05B33/0872 ,  G01J1/42 ,  G01J1/4204 ,  G01J3/505 ,  G01J2001/4238 ,  G01J2001/4247 ,  G03B15/02 ,  H05B33/0854 ,  H05B37/0218

Abstract: Flash light-generating methods and systems are provided, which, in one aspect, include: obtaining one or more measurements of existing light on or around an illumination target; ascertaining a desired color attribute(s) for a combined light to be provided on the illumination target, the combined light including the existing light and a flash light to be generated; determining a flash light spectral power distribution of illumination which achieves a combined light spectral power distribution of illumination on the illumination target having the desired color attribute(s), the determining using, in part, the measurement(s) of existing light, and the desired color attribute(s) for the combined light; and generating the flash light with the determined flash light spectral power distribution of illumination to provide the combined light on the illumination target having the combined light spectral power distribution of illumination with the desired color attribute(s).

公开(公告)号：US09591950B2

公开(公告)日：2017-03-14

申请号：US14963152

申请日：2015-12-08

Applicant: BOBRICK WASHROOM EQUIPMENT, INC.

Inventor： Branko Bem ,  Dikran Babikian

IPC: A47K5/12

CPC classification number: A47K5/1217 ,  G01J1/0425 ,  G01J1/44 ,  G01J1/46 ,  G01J2001/4238 ,  H03K17/941 ,  H03K2217/94106

Abstract: A method for automated dispensing of a fluid. The method includes providing a light pulse to a location proximate a dispensing outlet from which said fluid will be dispensed, sensing a light received from that location, where the sensed light includes at least one of an ambient light or a reflection of said light pulse, generating a signal corresponding to the sensed light, generating a transistor-transistor logic (TTL) signal if the reflection of the light pulse is determined and pumping a fluid to the dispenser outlet in response to said TTL signal.

Abstract translation: 一种用于自动分配流体的方法。 该方法包括：将光脉冲提供到靠近分配出口的位置，从该分配出口处分配所述流体，感测从该位置接收的光，其中感测的光包括环境光或所述光脉冲的反射中的至少一个， 产生对应于感测到的光的信号，如果确定了光脉冲的反射，则产生晶体管晶体管逻辑（TTL）信号，并响应于所述TTL信号将流体泵送到分配器出口。

公开(公告)号：US09207119B2

公开(公告)日：2015-12-08

申请号：US13830466

申请日：2013-03-14

Applicant: Cymer, LLC

Inventor： Rostislav Rokitski ,  Nakgeuon Seong ,  Kevin O'Brien

IPC: G01J3/46 ,  G01J3/28 ,  G03F7/20 ,  G01J3/18 ,  G01J11/00 ,  G01J3/02 ,  G01J1/42 ,  G01J9/00

CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/1809 ,  G01J11/00 ,  G01J2001/4238 ,  G01J2009/006 ,  G03F7/70091 ,  G03F7/70575 ,  G03F7/7085

Abstract: A spectral feature of a pulsed light beam produced by an optical source is estimated by modifying the wavelength of the pulsed light beam based on a predefined repeating pattern having a pattern period including a plurality of steps, the modification including shifting the wavelength of the pulsed light beam by a wavelength offset from a baseline wavelength for each step in the pattern period; measuring the wavelength of the light beam for each step in the pattern period as the wavelength is modified across the pattern; and estimating a spectral feature of the pulsed light beam over an evaluation window that includes all of the steps within the pattern period based at least in part on the measured wavelength of the light beam for each step in the pattern period.

Abstract translation: 由光源产生的脉冲光束的光谱特征通过基于具有包括多个步骤的图案周期的预定重复图案修改脉冲光束的波长来估计，该修改包括移动脉冲光的波长 在图案周期中对于每个步骤的基线波长的波长偏移; 在图案周期中测量每个步骤的光束的波长，当波长跨越图案被修改时; 以及至少部分地基于所述模式周期中的每个步骤的所述光束的波长来估计包括所述模式周期内的所有步骤的评估窗口上的所述脉冲光束的光谱特征。

公开(公告)号：US20150253198A1

公开(公告)日：2015-09-10

申请号：US14423973

申请日：2013-08-26

Applicant: Robert Bosch GmbH

Inventor： Lothar Bergen ,  Paul Ruhnau

IPC: G01J11/00 ,  H04N5/232 ,  G01J1/42

CPC classification number: G01J11/00 ,  G01J1/42 ,  G01J2001/4238 ,  G06K9/00825 ,  H04N5/23216 ,  H04N5/23219 ,  H04N5/35581

Abstract: For detecting at least one pulsed light source, light emitted by the pulsed light source being detected by a detector unit, a method includes detecting a first image parameter of the light of the light source using a first exposure time; detecting at least a second image parameter of the light of the light source using an at least second exposure time, the first exposure time and the at least second exposure time being different, and the detector unit being set to a predetermined value between the detection of the first image parameter and the detection of the at least second image parameter, the first image parameter and the at least second image parameter chronologically consecutively representing the same spatial location; and evaluating the at least second image parameter to detect a pulsed light source when at least the at least second image parameter meets a predetermined criterion.

Abstract translation: 为了检测至少一个脉冲光源，由检测器单元检测由脉冲光源发射的光，该方法包括使用第一曝光时间检测光源的光的第一图像参数; 使用至少第二曝光时间来检测所述光源的光的至少第二图像参数，所述第一曝光时间和所述至少第二曝光时间不同，并且所述检测器单元被设置为在 所述第一图像参数和所述至少第二图像参数的检测，所述第一图像参数和所述至少第二图像参数按时间顺序连续地表示相同的空间位置; 以及当至少所述至少第二图像参数满足预定标准时，评估所述至少第二图像参数以检测脉冲光源。

公开(公告)号：US20140176183A1

公开(公告)日：2014-06-26

申请号：US14012668

申请日：2013-08-28

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Herschel A. Ainspan ,  SEONGWON KIM ,  FRANCO STELLARI ,  ALAN J. WEGER

IPC: G01R31/26 ,  H03K19/094

CPC classification number: H04N17/002 ,  G01J1/44 ,  G01J11/00 ,  G01J2001/4238 ,  G01R31/26 ,  H03K19/094 ,  H03K19/14

Abstract: PICA test circuits are shown that include a first transistor and a second transistor laid out drain-to-drain, such that a gap between respective drain regions of the first and second transistors has a minimum size allowed by a given fabrication technology.

Abstract translation: 示出了PICA测试电路，其包括布置在漏极到漏极的第一晶体管和第二晶体管，使得第一和第二晶体管的各个漏极区之间的间隙具有由给定制造技术允许的最小尺寸。

公开(公告)号：US20130278285A1

公开(公告)日：2013-10-24

申请号：US13452092

申请日：2012-04-20

Applicant: HERSCHEL A. AINSPAN ,  SEONGWON KIM ,  FRANCO STELLARI ,  ALAN J. WEGER

Inventor： HERSCHEL A. AINSPAN ,  SEONGWON KIM ,  FRANCO STELLARI ,  ALAN J. WEGER

IPC: H03K19/00 ,  H03K19/094

CPC classification number: H04N17/002 ,  G01J1/44 ,  G01J11/00 ,  G01J2001/4238 ,  G01R31/26 ,  H03K19/094 ,  H03K19/14

Abstract: PICA test circuits are shown that include a first transistor and a second transistor laid out drain-to-drain, such that a gap between respective drain regions of the first and second transistors has a minimum size allowed by a given fabrication technology; a first NOR gate having an output connected to the drain region of the first transistor and accepting a first select signal and an input signal; and a second NOR gate having an output connected to the drain region of the second transistor and accepting a second select signal and the input signal. One of said NOR gates biases the connected transistor's drain region, according to the select signal of said NOR gate, to inhibit an optical emission when said connected transistor is triggered.

Abstract translation: 显示了PICA测试电路，其包括第一晶体管和布置为漏极到漏极的第二晶体管，使得第一和第二晶体管的各个漏极区之间的间隙具有由给定制造技术允许的最小尺寸; 第一或非门，其输出连接到第一晶体管的漏极区，并接受第一选择信号和输入信号; 以及第二或非门，其输出连接到第二晶体管的漏极区，并接受第二选择信号和输入信号。 所述或非门之一根据所述或非门的选择信号偏置所连接的晶体管的漏极区，以在所述连接的晶体管被​​触发时抑制光发射。

公开(公告)号：US07581880B2

公开(公告)日：2009-09-01

申请号：US11754493

申请日：2007-05-29

Applicant: Hiroyuki Kawano ,  Tatsuki Okamoto ,  Toshirou Nakashima ,  Kazuo Takashima

Inventor： Hiroyuki Kawano ,  Tatsuki Okamoto ,  Toshirou Nakashima ,  Kazuo Takashima

IPC: G01K11/00

CPC classification number: G01J5/602 ,  G01J5/08 ,  G01J5/0846 ,  G01J5/0859 ,  G01J2001/4238 ,  G01J2001/4247 ,  G01J2005/0048 ,  G01J2005/0077 ,  G03B21/16 ,  G03B21/2026 ,  G03B21/2086 ,  G03B27/54

Abstract: A radiant-temperature measurement device includes a time-based data measurement unit for acquiring, based on an intensity of first light, a first data value during a first measuring interval in a first intensity duration, and a second data value during a second measuring interval in a second intensity duration. The time-based data measurement unit is also for acquiring, based on an intensity of second light, a third data value in a first wavelength band, and a fourth data value in a second wavelength band, during the first measuring interval, and a fifth data value in the first wavelength band, and a sixth data value in the second wavelength band, during the second measuring interval. The radiant-temperature measurement device also includes a temperature calculation unit for calculating, based on the first, second, third, fourth, fifth, and sixth data values, a temperature of a light source at its light-emitting end.

Abstract translation: 辐射温度测量装置包括基于时间的数据测量单元，用于在第一强度持续时间内的第一测量间隔期间获取基于第一光强度的第一数据值，以及在第二测量间隔期间获取第二数据值 在第二强度持续时间。 基于时间的数据测量单元还用于在第一测量间隔期间基于第二光的强度获取第一波长带中的第三数据值和第二波长带中的第四数据值，以及第五测量单元 在第二测量间隔期间，第一波长带中的数据值和第二波长带中的第六数据值。 辐射温度测量装置还包括用于基于第一，第二，第三，第四，第五和第六数据值计算其发光端的光源的温度的温度计算单元。

公开(公告)号：US07297911B2

公开(公告)日：2007-11-20

申请号：US11184066

申请日：2005-07-19

Applicant: Stefan Geerte Kruijswijk ,  Johannes Heintze ,  Paul Van Der Veen

Inventor： Stefan Geerte Kruijswijk ,  Johannes Heintze ,  Paul Van Der Veen

IPC: G03B27/52

CPC classification number: G01J1/32 ,  G01J2001/4238 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/708

Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam. The illumination system includes a pulsed source of radiation and a controller to control an output of the pulsed source of radiation. The controller includes a dose sensor to measure a dose of a pulse of the source of radiation. The dose sensor includes a dose sensor output to provide a dose signal representative of the measured dose. An integrator unit is connected to the dose sensor output. The integrator unit integrates the dose signal at least twice, an output of the integrator unit provides an integrator output signal including the at least twice integrated dose signal. The output of the integrator unit drives a driving input of the source of radiation with the integrator output signal.

Abstract translation: 光刻设备包括被配置为调节辐射束的照明系统。 照明系统包括脉冲辐射源和控制脉冲辐射源的输出的控制器。 控制器包括用于测量辐射源的脉冲的剂量的剂量传感器。 剂量传感器包括剂量传感器输出以提供表示测量剂量的剂量信号。 积分器单元连接到剂量传感器输出。 积分器单元将剂量信号整合至少两次，积分器单元的输出提供包括至少两次积分的剂量信号的积分器输出信号。 积分器单元的输出通过积分器输出信号驱动辐射源的驱动输入。

公开(公告)号：US20040174425A1

公开(公告)日：2004-09-09

申请号：US10717545

申请日：2003-11-21

Applicant: Canon Kabushiki Kaisha

Inventor： Takahiro Akamatsu

IPC: B41J002/435

CPC classification number: G01J1/4228 ,  G01J1/04 ,  G01J1/0418 ,  G01J2001/4238

Abstract: This invention provides an exposure apparatus capable of properly reading an electrical signal from a photoelectric sensor by using the time interval between emission pulses even at a high emission frequency of the light source. A photoelectric sensor attached to an exposure apparatus which exposes a substrate to a pulse beam emitted by a light source for generating a pulse beam has a plurality of photoelectric converters (29-1-29-n). The photoelectric converters (29-1-29-n) are divided into a plurality of blocks. While charges are read from each block by using one time interval between pulse beams, charges in all the photoelectric converters (29-1-29-n) are read by using a plurality of time intervals between pulse beams.

Abstract translation: 本发明提供一种即使在光源的高发射频率下也可以通过使用发射脉冲之间的时间间隔来适当地读取来自光电传感器的电信号的曝光装置。 安装在曝光装置上的光电传感器具有多个光电转换器（29-1-29-n），该曝光装置将由基板发射的脉冲光束曝光于产生脉冲光束的光源。 光电转换器（29-1-29-n）被分成多个块。 虽然通过在脉冲波束之间使用一个时间间隔从每个块读取电荷，但是通过使用脉冲波束之间的多个时间间隔来读取所有光电转换器（29-1-29-n）中的电荷。