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    TOOLS AND METHODS FOR MOUNTING TRANSPORT RAILS IN A SUBSTRATE PROCESSING SYSTEM
    1.
    发明申请
    TOOLS AND METHODS FOR MOUNTING TRANSPORT RAILS IN A SUBSTRATE PROCESSING SYSTEM 有权
    用于在基板处理系统中安装运输轨道的工具和方法

    公开(公告)号：US20090279990A1

    公开(公告)日：2009-11-12

    申请号：US12263369

    申请日：2008-10-31

    Applicant: Stuart Scollay

    Inventor： Stuart Scollay

    IPC: H01L21/677 ,  B21D53/00

    CPC classification number: H01L21/68 ,  H01L21/67126 ,  H01L21/67706 ,  Y10T29/49895

    Abstract: Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement.

    Abstract translation: 描述了用于将输送轨道安装和对准基板处理系统的处理室的装置和方法。 对准特征内置于运输轨道中，并且相应的对准特征被添加到分离处理室的阀门。 对准特征可以是针槽布置。

    Tools and methods for mounting transport rails in a substrate processing system
    2.
    发明授权
    Tools and methods for mounting transport rails in a substrate processing system 有权
    将输送轨道安装在基板处理系统中的工具和方法

    公开(公告)号：US08382965B2

    公开(公告)日：2013-02-26

    申请号：US12263369

    申请日：2008-10-31

    Applicant: Stuart Scollay

    Inventor： Stuart Scollay

    IPC: C23C14/00 ,  C25B11/00 ,  C25B13/00

    CPC classification number: H01L21/68 ,  H01L21/67126 ,  H01L21/67706 ,  Y10T29/49895

    Abstract: Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement.

    Abstract translation: 描述了用于将输送轨道安装和对准基板处理系统的处理室的装置和方法。 对准特征内置于运输轨道中，并且相应的对准特征被添加到分离处理室的阀门。 对准特征可以是针槽布置。

    ELEVATOR LINEAR MOTOR DRIVE
    5.
    发明申请
    ELEVATOR LINEAR MOTOR DRIVE 有权
    电梯线性电机驱动

    公开(公告)号：US20090123256A1

    公开(公告)日：2009-05-14

    申请号：US11938728

    申请日：2007-11-12

    Applicant: Stuart Scollay

    Inventor： Stuart Scollay

    IPC: H01L21/677 ,  B65G65/30

    CPC classification number: H01L21/67742 ,  G11B5/8404 ,  H01L21/67346 ,  H01L21/67709 ,  H01L21/67748 ,  H01L21/67751 ,  H01L2221/67 ,  Y10S414/139

    Abstract: Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.

    Abstract translation: 公开了一种具有磁导管结构以改善衬底载体在系统内的运动的衬底处理系统。 该配置专门提供载体在基底处理系统的多个层次之间的安全，可靠的移动，其中通过使用磁导管来重定向由线性马达产生的磁力，允许线性马达位于系统外部，并且位于 不会干扰载体的移动。

    SYSTEM AND METHOD FOR SUBSTRATE TRANSPORT
    7.
    发明申请
    SYSTEM AND METHOD FOR SUBSTRATE TRANSPORT 有权
    基板运输系统及方法

    公开(公告)号：US20090324369A1

    公开(公告)日：2009-12-31

    申请号：US12495740

    申请日：2009-06-30

    Applicant: Stuart SCOLLAY ,  Terry Bluck ,  Xiang Chen

    Inventor： Stuart SCOLLAY ,  Terry Bluck ,  Xiang Chen

    IPC: H01L21/677

    CPC classification number: H01L21/67173 ,  H01L21/67313 ,  H01L21/67775 ,  H01L21/67781 ,  Y10S414/14

    Abstract: Introduction of substrates into vacuum environment is accomplish by gradually reducing the number of substrates being transferred simultaneously as the clean and evacuated environment is progressed. Cassettes are maintained in clean atmospheric environment and do not enter the vacuum environment. Several vacuum locks are linearly staggered so as to introduce progressively higher level of vacuum environment. The number of substrates transported through this arrangement is a portion of the number of substrates present in each cassette. The staggered vacuum locks lead to a series of processing chambers, wherein a yet smaller number of substrates, e.g., one or two, are transported.

    Abstract translation: 将衬底引入真空环境中，通过在清洁和抽空的环境进行时，逐渐减少同时转移的衬底数量来实现。 纸盒保持在清洁的大气环境中，不要进入真空环境。 几个真空锁线性交错，以便逐渐引入更高水平的真空环境。 通过该布置传送的基板的数量是每个盒中存在的基板数量的一部分。 交错的真空锁导致一系列的处理室，其中传输了更少数量的基板，例如一个或两个。

    System and method for substrate transport
    9.
    发明授权
    System and method for substrate transport 有权
    衬底运输的系统和方法

    公开(公告)号：US08992153B2

    公开(公告)日：2015-03-31

    申请号：US12495740

    申请日：2009-06-30

    Applicant: Stuart Scollay ,  Terry Bluck ,  Xiang Chen

    Inventor： Stuart Scollay ,  Terry Bluck ,  Xiang Chen

    IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

    CPC classification number: H01L21/67173 ,  H01L21/67313 ,  H01L21/67775 ,  H01L21/67781 ,  Y10S414/14

    Abstract: Introduction of substrates into vacuum environment is accomplish by gradually reducing the number of substrates being transferred simultaneously as the clean and evacuated environment is progressed. Cassettes are maintained in clean atmospheric environment and do not enter the vacuum environment. Several vacuum locks are linearly staggered so as to introduce progressively higher level of vacuum environment. The number of substrates transported through this arrangement is a portion of the number of substrates present in each cassette. The staggered vacuum locks lead to a series of processing chambers, wherein a yet smaller number of substrates, e.g., one or two, are transported.

    Abstract translation: 将衬底引入真空环境中，通过在清洁和抽空的环境进行时，逐渐减少同时转移的衬底数量来实现。 纸盒保持在清洁的大气环境中，不要进入真空环境。 几个真空锁线性交错，以便逐渐引入更高水平的真空环境。 通过该布置传送的基板的数量是每个盒中存在的基板数量的一部分。 交错的真空锁导致一系列的处理室，其中传输了更少数量的基板，例如一个或两个。

    Elevator linear motor drive
    10.
    发明授权
    Elevator linear motor drive 有权
    电梯线性电机驱动

    公开(公告)号：US08834088B2

    公开(公告)日：2014-09-16

    申请号：US11938728

    申请日：2007-11-12

    Applicant: Stuart Scollay

    Inventor： Stuart Scollay

    IPC: H01L21/677 ,  G11B5/84 ,  H01L21/673

    CPC classification number: H01L21/67742 ,  G11B5/8404 ,  H01L21/67346 ,  H01L21/67709 ,  H01L21/67748 ,  H01L21/67751 ,  H01L2221/67 ,  Y10S414/139

    Abstract: Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.

    Abstract translation: 公开了一种具有磁导管结构以改善衬底载体在系统内的运动的衬底处理系统。 该配置专门提供载体在基底处理系统的多个层次之间的安全，可靠的移动，其中通过使用磁导管来重定向由线性马达产生的磁力，允许线性马达位于系统外部，并且位于 不会干扰载体的移动。

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