公开(公告)号：US5020910A

公开(公告)日：1991-06-04

申请号：US488158

申请日：1990-03-05

Applicant: William C. Dunn ,  Stuart T. Langley

Inventor： William C. Dunn ,  Stuart T. Langley

IPC: G01J3/18 ,  G01J3/28

CPC classification number: G01J3/18 ,  G01J3/0259 ,  G01J3/2803

Abstract: A monolithic diffraction spectrometer having a diffraction grating formed over a light sensing array is provided. The diffraction grating serves to diffract wavelengths of interest to an underlying photosensitive device while diffracting other wavelengths away from the photosensing element. By forming a diffraction grating with a variable pitch, or multiple diffraction gratings having various pitches, any number of specific light wavelengths can be detected with a high degree of precision. When a diffraction grating having a pitch which is in the order of the incident wavelength of light is used, improved sensitivity is achieved.

Abstract translation: 提供了具有形成在光感测阵列上的衍射光栅的单片衍射光谱仪。 衍射光栅用于将感兴趣的波长衍射到下面的光敏器件，同时将其它波长衍射离开感光元件。 通过形成具有可变间距的衍射光栅或具有各种间距的多个衍射光栅，可以高精度地检测任意数量的特定光波长。 当使用具有光入射波长顺序的间距的衍射光栅时，获得了提高的灵敏度。