Mechanical Oscillator and Associated Production Method

    公开(公告)号:US20180004161A1

    公开(公告)日:2018-01-04

    申请号:US15544754

    申请日:2016-02-12

    CPC classification number: G04B17/066 B81B3/0081 F16F1/021 G04B17/04 G04B17/22

    Abstract: A mechanical oscillator endowed with a strip, with the aforesaid strip incorporating a first silicon layer having a crystal lattice extending along a first direction of one plane, a thermal compensation layer composed of a material having a Young's modulus thermal coefficient of opposite sign to that of the silicon, and a second silicon layer having a crystal lattice extending in a second direction of the plane, with the first and direction being offset at an angle of 45° within the plane of the layers, and with the thermal compensation layer extending between the first and second silicon layers.

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