公开(公告)号：US20130070234A1

公开(公告)日：2013-03-21

申请号：US13701698

申请日：2011-05-30

Applicant: Guoguang Li ,  Tao Liu ,  Edgar Genio ,  Tiezhong Ma ,  Yan Xiaolang

Inventor： Guoguang Li ,  Tao Liu ,  Edgar Genio ,  Tiezhong Ma ,  Yan Xiaolang

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01N21/21

Abstract: An oblique incidence broadband spectroscopic polarimeter which is easy to adjust the focus, achromatic, maintains the polarization and has simple structure is provided. It comprise at least one polarizer (P, A), at least one curved reflector element (OAP1, OAP2, OAP3, OAP4) and at least two flat reflector elements (M1, M2). By utilizing the flat reflector element, the oblique incidence broadband spectroscopic polarimeter can change the propagate direction of beam, and compensate the polarization changes caused by the reflective focusing unit, make the polarization of beam passed the polarizer unchanged when obliquely incident and focus on the sample surface. The oblique incidence broadband spectroscopic polarimeter can accurately measure the optical constants of sample material, film thickness, and/or the critical dimension (CD) properties or three-dimensional profile for analyze the periodic structure of the sample. An optical measurement system including the oblique incidence broadband spectroscopic polarimeter is also provided.

Abstract translation: 提供了一种倾斜入射宽带光谱旋光计，其易于调节焦点，消色差，保持偏振并且具有简单的结构。 它包括至少一个偏振器（P，A），至少一个弯曲反射器元件（OAP1，OAP2，OAP3，OAP4）和至少两个平面反射器元件（M1，M2）。 通过利用平面反射元件，倾斜入射宽带光谱旋光计可以改变光束的传播方向，并补偿由反射聚焦单元引起的偏振变化，使得当倾斜入射时光束的偏振通过偏振器不变，并聚焦在样品上 表面。 倾斜入射宽带光谱旋光计可以精确测量样品材料的光学常数，膜厚度和/或临界尺寸（CD）性质或三维轮廓，以分析样品的周期性结构。 还提供了包括斜入射宽带光谱偏振计的光学测量系统。

公开(公告)号：US08767209B2

公开(公告)日：2014-07-01

申请号：US13701698

申请日：2011-05-30

Applicant: Guoguang Li ,  Tao Liu ,  Edgar Genio ,  Tiezhong Ma ,  Yan Xiaolang

Inventor： Guoguang Li ,  Tao Liu ,  Edgar Genio ,  Tiezhong Ma ,  Yan Xiaolang

IPC: G01J4/00 ,  G01N21/21

CPC classification number: G01N21/211 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01N21/21

Abstract: An oblique incidence broadband spectroscopic polarimeter which is easy to adjust the focus, achromatic, maintains the polarization and has simple structure is provided. It comprise at least one polarizer (P, A), at least one curved reflector element (OAP1, OAP2, OAP3, OAP4) and at least two flat reflector elements (M1, M2). By utilizing the flat reflector element, the oblique incidence broadband spectroscopic polarimeter can change the propagate direction of beam, and compensate the polarization changes caused by the reflective focusing unit, make the polarization of beam passed the polarizer unchanged when obliquely incident and focus on the sample surface. The oblique incidence broadband spectroscopic polarimeter can accurately measure the optical constants of sample material, film thickness, and/or the critical dimension (CD) properties or three-dimensional profile for analyze the periodic structure of the sample. An optical measurement system including the oblique incidence broadband spectroscopic polarimeter is also provided.

Abstract translation: 提供了一种易于调整焦点，消色差，保持极化并具有简单结构的倾斜入射宽带光谱偏振计。 它包括至少一个偏振器（P，A），至少一个弯曲反射器元件（OAP1，OAP2，OAP3，OAP4）和至少两个平面反射器元件（M1，M2）。 通过利用平面反射元件，倾斜入射宽带光谱旋光计可以改变光束的传播方向，并补偿由反射聚焦单元引起的偏振变化，使得当倾斜入射时光束的偏振通过偏振器不变，并聚焦在样品上 表面。 倾斜入射宽带光谱旋光计可以精确测量样品材料的光学常数，膜厚度和/或临界尺寸（CD）性质或三维轮廓，以分析样品的周期性结构。 还提供了包括斜入射宽带光谱偏振计的光学测量系统。