公开(公告)号：US12235577B2

公开(公告)日：2025-02-25

申请号：US18257241

申请日：2021-12-08

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： Lucas J. Hunt ,  Ashley R. Sonnier ,  James Zhu ,  Edwin L. Kusilek ,  Paul B. Armstrong ,  William B. Kolb ,  Caleb T. Nelson ,  Jeffrey L. Solomon ,  James M. Nelson ,  Samuel R. Hei ,  David J. Tarnowski ,  Henrik B. van Lengerich

IPC: G03F7/00 ,  B29C59/00 ,  H01L21/027

Abstract: Methods of forming an array of patterns on a substrate are provided. An array of protective tiles formed from a protectant resin is provided to cover an array of sub-regions on the substrate. An array of patterns is formed on the substrate by sequentially repeating steps (i) and (ii) for each sub-region: (i) removing the protective tile from one of the sub-regions to expose the first major surface underneath; and (ii) forming a pattern on the exposed first major surface within the one of the sub-regions.

公开(公告)号：US20240045324A1

公开(公告)日：2024-02-08

申请号：US18257241

申请日：2021-12-08

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： Lucas J. Hunt ,  Ashley R. Sonnier ,  James Zhu ,  Edwin L. Kusilek ,  Paul B. Armstrong ,  William B. Kolb ,  Caleb T. Nelson ,  Jeffrey L. Solomon ,  James M. Nelson ,  Samuel R. Hei ,  David J. Tarnowski ,  Henrik B. van Lengerich

IPC: G03F7/00

CPC classification number: G03F7/0002

Abstract: Methods of forming an array of patterns on a substrate are provided. An array of protective tiles formed from a protectant resin is provided to cover an array of sub-regions on the substrate. An array of patterns is formed on the substrate by sequentially repeating steps (i) and (ii) for each sub-region: (i) removing the protective tile from one of the sub-regions to expose the first major surface underneath; and (ii) forming a pattern on the exposed first major surface within the one of the sub-regions.