公开(公告)号：US09176008B2

公开(公告)日：2015-11-03

申请号：US13870308

申请日：2013-04-25

Applicant: ADVANTEST CORPORATION

Inventor： Shigeki Nishina ,  Motoki Imamura ,  Akiyoshi Irisawa ,  Tomoyu Yamashita ,  Eiji Kato ,  Kodo Kawase

IPC: G01S3/02 ,  G01J5/02 ,  G01N21/3581 ,  G01N21/88 ,  G01N21/3563

CPC classification number: G01J5/0285 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/8806

Abstract: An electromagnetic wave measurement device includes an electromagnetic wave outputter that outputs an electromagnetic wave having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz toward a device under test. An electromagnetic wave detector detects the electromagnetic wave which has transmitted through the device under test. A relative position changer changes a relative position of an intersection of an optical path of the electromagnetic wave transmitting through the device under test and the device under test, with respect to the device under test, so that the intersection is at a predetermined relative position due to the refraction of the electromagnetic wave by the device under test. A characteristic value deriver derives a characteristic value of the electromagnetic wave based on a detection result of the electromagnetic wave detector, the characteristic value being associated with the predetermined relative position.

Abstract translation: 电磁波测量装置包括电磁波输出器，其向被测设备输出频率等于或大于0.01THz且等于或小于100THz的电磁波。 电磁波检测器检测已经通过被测设备的电磁波。 相对位置更换器相对于被测设备改变通过被测设备的电磁波的光路与被测设备的相对位置，使得交叉点处于预定的相对位置 对被测器件的电磁波的折射。 特征值提取器基于电磁波检测器的检测结果导出电磁波的特征值，特征值与预定的相对位置相关联。

公开(公告)号：US10919105B2

公开(公告)日：2021-02-16

申请号：US16121581

申请日：2018-09-04

Applicant: ADVANTEST CORPORATION

Inventor： Shinji Sugatani ,  Shigeki Nishina ,  Jun Matsumoto ,  Masahiro Takizawa ,  Minoru Soma ,  Akio Yamada

IPC: B23K26/34 ,  B23K15/00 ,  B33Y10/00 ,  B33Y30/00 ,  B23K15/02 ,  B33Y50/02 ,  B22F3/105 ,  B29C64/268 ,  B29C64/153 ,  B33Y40/00

Abstract: Provided is a three-dimensional laminating and shaping apparatus 100 including a column unit 200 that is configured to output an electron beam EB and deflect the electron beam EB toward the front surface of a powder layer 32, an electron detector 72 that is configured to detect electrons that may be emitted in a predetermined direction from the front surface of the powder layer 32 when the powder layer 32 is irradiated with the electron beam EB, a melting judging unit 410 that is configured to generate a melting signal based on the strength of the detection signal from the electron detector 72, and a deflection controller 420 that is configured to receive the melting signal to determine the condition of the irradiation the electron beam.

公开(公告)号：US11229971B2

公开(公告)日：2022-01-25

申请号：US16127225

申请日：2018-09-11

Applicant: ADVANTEST CORPORATION

Inventor： Shinji Sugatani ,  Shigeki Nishina ,  Jun Matsumoto ,  Masahiro Takizawa ,  Minoru Soma ,  Akio Yamada

IPC: B23K15/00 ,  B28B1/00 ,  B28B17/00 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B29C64/268 ,  B29C64/153 ,  B22F10/20 ,  B23K15/02 ,  B33Y40/00 ,  B22F10/30

Abstract: Provided is a three-dimensional laminating and shaping apparatus 100 including a column unit 200 that is configured to output an electron beam EB and deflect the electron beam EB toward the front surface of a powder layer 32, an insulating portion that electrically insulates a three-dimensional structure 36 from a ground potential member, an ammeter 73 that is configured to measure the current value indicative of the current flowing into the ground after passing through the three-dimensional structure 36, a melting judging unit 410 that is configured to detect that the powder layer 32 is melted based on the current value measured by the ammeter 73 and generate a melting signal, and a deflection controller 420 that is configured to receive the melting signal to determine the condition for the irradiation with the electron beam.