公开(公告)号：US20200150069A1

公开(公告)日：2020-05-14

申请号：US16186824

申请日：2018-11-12

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Simon Jonathan Stacey

IPC: G01N27/12

Abstract: A gas sensing device comprising a substrate comprising an etched cavity portion and a substrate portion; a dielectric layer disposed on the substrate. The dielectric layer comprises a dielectric membrane. The dielectric membrane is adjacent to the etched cavity portion of the substrate. The dielectric membrane comprises an etched recess portion, a heater located within the dielectric layer, and a material for sensing a gas. The material for sensing a gas is located within the etched recess portion of the dielectric membrane.

公开(公告)号：US20200096396A1

公开(公告)日：2020-03-26

申请号：US16143323

申请日：2018-09-26

Applicant: AMS Sensors UK Limited

Inventor： Claudio Zuliani ,  Richard Henry Hopper ,  Florin Udrea ,  Andrea De Luca ,  James Eilertsen

IPC: G01K7/04

Abstract: We disclose herein a gas sensor comprising a catalyst material; a temperature detector configured to measure a change in temperature of the catalyst material; and a plurality of electrodes configured to measure the current and/or resistance of the catalytic material. The gas sensor can be formed using CMOS or CMOS-SOI technologies.

公开(公告)号：US20190265106A1

公开(公告)日：2019-08-29

申请号：US15908159

申请日：2018-02-28

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Andrea De Luca

IPC: G01J5/12

Abstract: We disclose herein an infra-red (IR) detector comprising a substrate comprising at least one etched portion and a substrate portion; a dielectric layer disposed on the substrate. The dielectric layer comprises at least one dielectric membrane, which is adjacent to the etched portion of the substrate. The detector further comprises a first sensing area and a second sensing area each located in a dielectric membrane and a plurality of thermocouples. At least one thermocouple comprises first and second thermal junctions. The first thermal junction is located in or on the first sensing area and the second thermal junction is located in or on the second sensing area.

公开(公告)号：US10128302B2

公开(公告)日：2018-11-13

申请号：US15009410

申请日：2016-01-28

Applicant: AMS SENSORS UK LIMITED

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper ,  Julian Gardner ,  Andrea De Luca

IPC: H01L27/16 ,  H01L27/146 ,  H01L31/024 ,  H01L31/028 ,  H01L31/09 ,  H01L31/103 ,  H01L31/112 ,  H01L31/12 ,  H01L37/02 ,  G01J5/02 ,  G01J5/12 ,  G01J5/20

Abstract: We disclose herein a thermal IR detector array device comprising a dielectric membrane, supported by a substrate, the membrane having an array of IR detectors, where the array size is at least 3 by 3 or larger, and there are tracks embedded within the membrane layers to separate each element of the array, the tracks also acting as heatsinks and/or cold junction regions.

公开(公告)号：US20170343502A1

公开(公告)日：2017-11-30

申请号：US15168547

申请日：2016-05-31

Applicant: AMS Sensors UK Limited

Inventor： Syed Zeeshan Ali ,  Simon Jonathan Stacey ,  Florin Udrea

IPC: G01N27/18 ,  H05B1/02

CPC classification number: G01N27/18 ,  G01N21/0332 ,  G01N21/3504 ,  G01N27/123 ,  G01N27/16 ,  G01N2201/06186 ,  H05B1/0288

Abstract: We disclose herein an environmental sensor system comprising an environmental sensor comprising a first heater and a second heater in which the first heater is configured to consume a lower power compared to the second heater. The system also comprises a controller coupled with the environmental sensor. The controller is configured to detect if a measured value of a targeted environmental parameter is present. The controller is configured to switch on at least one of the first and second heaters based on the presence and/or result of the measured value of the targeted environmental parameter.

公开(公告)号：US20170343500A1

公开(公告)日：2017-11-30

申请号：US15168464

申请日：2016-05-31

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Mohamed Foysol Chowdhury

IPC: G01N27/12 ,  G01K17/00 ,  G01K7/16 ,  H01L21/67 ,  H05B3/28

Abstract: We disclose a micro-hotplate comprising a substrate comprising an etched portion and a substrate portion and a dielectric region over the substrate. The dielectric region comprises first and second portions. The first portion is adjacent to the etched portion of the substrate and the second portion is adjacent to the substrate portion of the substrate. The micro-hotplate further comprises a heater formed in the dielectric region, and a ring structure formed within and/or over the dielectric region such that the ring structure is coupled with the first and second portions of the dielectric region.

公开(公告)号：US10883804B2

公开(公告)日：2021-01-05

申请号：US15852225

申请日：2017-12-22

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper

IPC: F41J2/02 ,  H01K1/02 ,  G01J5/52 ,  G01J5/02 ,  G01J3/10 ,  G01J5/08

Abstract: We disclose herein an infra-red (IR) device comprising a substrate comprising an etched cavity portion and a substrate portion; a dielectric layer disposed on the substrate. The dielectric layer comprises a dielectric membrane which is adjacent, or directly above, or below the etched cavity portion of the substrate. The device further comprises a reflective layer on or in or above or below the dielectric membrane to enhance emission or absorption of infrared light at one or more wavelengths.

公开(公告)号：US10551246B2

公开(公告)日：2020-02-04

申请号：US15009300

申请日：2016-01-28

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper ,  Julian Gardner ,  Andrea De Luca

IPC: G01J3/42 ,  G01J3/28 ,  H01L23/34 ,  H01L27/144 ,  H01L27/146 ,  H01L27/16 ,  H01L31/02 ,  H01L31/0203 ,  H01L31/0216 ,  H01L31/0232 ,  H01L31/028 ,  H01L31/16 ,  H01L31/18 ,  H01L37/02

Abstract: We disclose an array of Infra-Red (IR) detectors comprising at least one dielectric membrane formed on a semiconductor substrate comprising an etched portion; at least two IR detectors, and at least one patterned layer formed within or on one or both sides of the said dielectric membrane for controlling the IR absorption of at least one of the IR detectors. The patterned layer comprises laterally spaced structures.

公开(公告)号：US10436646B2

公开(公告)日：2019-10-08

申请号：US15908159

申请日：2018-02-28

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Andrea De Luca

IPC: G01J5/12

Abstract: We disclose herein an infra-red (IR) detector comprising a substrate comprising at least one etched portion and a substrate portion; a dielectric layer disposed on the substrate. The dielectric layer comprises at least one dielectric membrane, which is adjacent to the etched portion of the substrate. The detector further comprises a first sensing area and a second sensing area each located in a dielectric membrane and a plurality of thermocouples. At least one thermocouple comprises first and second thermal junctions. The first thermal junction is located in or on the first sensing area and the second thermal junction is located in or on the second sensing area.

公开(公告)号：US20190198487A1

公开(公告)日：2019-06-27

申请号：US15852257

申请日：2017-12-22

Applicant: AMS Sensors UK Limited

Inventor： Florin Udrea ,  Syed Zeeshan Ali ,  Richard Henry Hopper ,  Rainer Minixhofer

IPC: H01L25/16 ,  H01L23/13 ,  H01L23/26 ,  H01L23/48 ,  H01L35/10 ,  H01L35/02 ,  H01L35/32 ,  H01L35/08 ,  H01L35/34 ,  H05B3/36

CPC classification number: H01L25/165 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/045 ,  G01J5/0815 ,  H01L21/78 ,  H01L23/13 ,  H01L23/26 ,  H01L23/481 ,  H01L24/11 ,  H01L24/13 ,  H01L24/48 ,  H01L35/02 ,  H01L35/08 ,  H01L35/10 ,  H01L35/32 ,  H01L35/34 ,  H01L2224/13025 ,  H01L2224/4845 ,  H05B3/36

Abstract: We disclose an Infrared (IR) device comprising a first substrate comprising a first cavity; a dielectric layer disposed on the first substrate; a second substrate disposed on the dielectric layer and on the opposite side of the first substrate, the second substrate having a second cavity. The device further comprises an optically transmissive layer attached to one of the first and second substrates; a further layer provided to another of the first and second substrates so that the IR device is substantially closed. Holes are provided through the dielectric layer so that a pressure in the first cavity is substantially the same level as a pressure in the second cavity.