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公开(公告)号：US20240351863A1
公开(公告)日：2024-10-24
申请号：US18710198
申请日：2022-11-16
Applicant: MERIDIAN INNOVATION PTE LTD.
Inventor： Wan Chia Ang , Piotr KROPELNICKI
IPC: B81B7/00 , B81C1/00 , G01J5/02 , G01J5/22 , H01L23/522
CPC classification number: B81B7/008 , B81C1/00246 , G01J5/0215 , G01J5/024 , G01J5/22 , H01L23/5226 , B81C2203/0735
Abstract: A CMOS-MEMS integrated device and a method for forming such a device are disclosed. The integrated device includes a double released MEMS infrared sensor. The double released MEMS sensor is a free-standing sensor over a lower sensor cavity which is etched into the substrate of the device. The free-spending MEMS sensor is devoid of a support dielectric membrane which supports the MEMS sensor, resulting in the MEMS sensor being suspended over the lower sensor cavity. The support dielectric is removed by a second release process. The second release process may also remove a protective dielectric layer over the MEMS sensor. The MEMS sensor without the protective dielectric layer enhances sensor sensitivity. In other cases, the free-standing MEMS sensor may include an absorber thereover. The absorber enhances sensor sensitivity.
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公开(公告)号：US20240339482A1
公开(公告)日：2024-10-10
申请号：US18628607
申请日：2024-04-05
Applicant: Teledyne FLIR Commercial Systems, Inc.
Inventor： Eric A. Kurth , Marin Sigurdson , Robert F. Cannata
CPC classification number: H01L27/14669 , G01J5/023 , G01J5/024 , G01J5/20 , G01J5/24 , H01L27/14636 , H01L27/14649 , H01L27/14683 , H04N5/33 , H04N25/75 , G01J2005/0077 , G01J2005/202
Abstract: Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a cross-section having a first section, a second section substantially parallel to the first section, and a third section joining the first section and the second section.
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3.发明公开公开(公告)号：US20240230413A1
公开(公告)日：2024-07-11
申请号：US18094334
申请日：2023-01-06
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chin-Jou KUO , Bor-Shiun LEE , Ming-Fa CHEN , Kun-Chuan LIN
Abstract: A reference element of an infrared sensor includes a substrate, a sacrificial layer, a supporting structure, a fence structure and an infrared sensing structure. The sacrificial layer is disposed on the substrate. The supporting structure is disposed on the substrate wherein the top surface of the supporting structure is coplanar with the top surface of the sacrificial layer. The fence structure is disposed on the substrate and surrounds the sacrificial layer wherein the top surface of the fence structure is coplanar with the top surface of the sacrificial layer, and there is an air gap between the fence structure and the supporting structure. The infrared sensing structure is disposed on the sacrificial layer, the supporting structure and the fence structure, and the infrared sensing structure has an opening corresponding to the air gap.
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公开(公告)号：US20230236067A1
公开(公告)日：2023-07-27
申请号：US18097138
申请日：2023-01-13
Applicant: Obsidian Sensors, Inc.
Inventor： Edward CHAN , Bing WEN , John HONG , Tallis CHANG , Seung-Tak RYU
CPC classification number: G01J5/24 , G01J1/4228 , G01J1/46 , G01J5/024 , H04N5/33 , G01J2001/444
Abstract: Methods of sensor readout and calibration and circuits for performing the methods are disclosed. In some embodiments, the methods include driving an active sensor at a voltage. In some embodiments, the methods include use of a calibration sensor, and the circuits include the calibration sensor. In some embodiments, the methods include use of a calibration current source and circuits include the calibration current source. In some embodiments, a sensor circuit includes a Sigma-Delta ADC. In some embodiments, a column of sensors is readout using first and second readout circuits during a same row time.
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公开(公告)号：US20230236065A1
公开(公告)日：2023-07-27
申请号：US18010901
申请日：2021-07-27
Applicant: LYNRED
Inventor： Willy Ludurczak , Marc Guillaumont
CPC classification number: G01J5/0853 , G01J5/024 , G01J5/20
Abstract: An infrared imaging microbolometer integrating a membrane assembled in suspension above a substrate by means of holding arms attached to anchoring nails is disclosed. The membrane includes a support layer crossing the upper end of the anchoring nails. It also includes an absorber or electrode deposited on the support layer and on the anchoring nails with a pattern forming at least two electrodes. It further includes a dielectric layer deposited on the absorber or electrode and on the support layer, at least two conductive vias formed through the dielectric layer in contact with the at least two electrodes, and a thermometric or thermoresistive material arranged on a planar surface formed at the level of the upper ends of the conductive vias.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20190204167A1
公开(公告)日：2019-07-04
申请号：US16207614
申请日：2018-12-03
Inventor： Mohammed Benwadih , Christine Revenant-Brizard
CPC classification number: G01K17/003 , G01J5/0025 , G01J5/024 , G01J5/046 , G01J5/061 , G01J5/20 , G01J5/34 , G01J2005/345 , G06K9/0002 , H01L37/02
Abstract: Thermal pattern sensor comprising several pixels located on a substrate, each pixel comprising a pyroelectric capacitor, the pyroelectric capacitor comprising a pyroelectric material located between two electrically conducting electrodes, the pyroelectric material comprising a sol-gel matrix in which first particles made of a first material and second particles made of a second material are dispersed. The first material being chosen from among calcium, lanthanum, tantalum, barium, lead and/or strontium oxides, the second material being chosen from among titanium, antimony, tin, zinc, gallium, vanadium and/or manganese oxides.
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7.发明申请公开(公告)号：US20190051787A1
公开(公告)日：2019-02-14
申请号：US16052279
申请日：2018-08-01
Inventor： Patrick Leduc
IPC: H01L31/113 , H01L31/18 , H01L27/146
CPC classification number: H01L31/1136 , G01J5/0235 , G01J5/024 , G01J5/045 , H01L21/00 , H01L27/1467 , H01L31/1868 , H01L31/1892
Abstract: A method for manufacturing a device (1) for detecting electromagnetic radiation. The method comprises the steps of: supplying a first substrate (400) comprising a reading circuit (340), at least two first contact plugs (343, 344) and at least one first annular bonding element (345) surrounding the first contact plugs (343, 344); supplying a second substrate comprising a cap (210), an annular side wall forming with the cap (210) a cavity filled with a sacrificial material and a detection structure (100) housed in the cavity. The method further comprising the steps of bonding the second substrate (200) on the first substrate (400); arranging at least one opening (212) in the second substrate (200); selective elimination of the sacrificial material; and closing the opening (212) under at least a primary vacuum.
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公开(公告)号：US20180321087A1
公开(公告)日：2018-11-08
申请号：US15962549
申请日：2018-04-25
Inventor： Patrick Leduc , Jean-Jacques Yon
CPC classification number: G01J5/20 , G01J5/024 , G01J5/045 , G01J5/0875
Abstract: An electromagnetic radiation detector comprising: at least one membrane suspended above a substrate; and a cap, closing a hermetic cavity including the at least one membrane. According to the invention: the thickness of the cap is less than or equal to 10 μm; the cap bears at least on support walls surrounding the membrane(s); and the detector has first and second metallic sealing layers intercalated on each other between the cap and the support walls, and between which a peripheral bonding zone extends. The invention also relates to a method of making such a detector. The invention provides an encapsulation solution using a thin cap, in which the membranes are not subjected to high temperatures.
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公开(公告)号：US20180149943A9
公开(公告)日：2018-05-31
申请号：US15522505
申请日：2015-11-04
Applicant: FLIR Surveillance, Inc.
Inventor： Irina PUSCASU
CPC classification number: G02F1/19 , G01J5/024 , G02B5/008 , G02F1/01 , H01Q1/422 , H01Q1/425 , H01Q15/0026 , H01Q15/0066
Abstract: A tunable electromagnetic radiation device that includes a wavelength selective structure comprising a plurality of layers. The plurality of layers includes a compound layer comprising a plurality of surface elements, an electrically isolating intermediate layer, and a continuous electrically conductive layer. The compound layer includes at least one metallic layer or metallic-like layer and at least one dielectric layer and is in contact with a first surface of the electrically isolating intermediate layer. The continuous electrically conductive layer is in contact with a second surface of the electrically isolating intermediate layer. The wavelength selective structure has at least one reflective or absorptive resonance band. The tunable electromagnetic radiation device further includes an electrode in electrical contact with at least one of the compound layer, the electrically isolating intermediate layer, and the continuous electrically conductive layer.
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公开(公告)号：US09964446B2
公开(公告)日：2018-05-08
申请号：US15035182
申请日：2014-11-04
Applicant: The University of Warwick
Inventor： David Gunnarsson , Evan Parker , Martin Prest , Mika Prunnila , Terence Whall
CPC classification number: G01J5/046 , G01J5/024 , G01J5/20 , G01J2005/106 , G01J2005/208 , H01L31/09 , H01L39/22 , H01L39/24
Abstract: A bolometer is described. A bolometer includes a superconductor-insulator-semiconductor-superconductor structure or a superconductor-insulator-semiconductor-insulator-superconductor structure. The semiconductor comprises an electron gas in a layer of silicon, germanium or silicon-germanium alloy in which valley degeneracy is at least partially lifted. The insulator or a one or both of the insulators may comprise a layer of dielectric material. The insulator or a one or both of the insulators may comprise a layer of non-degenerately doped semiconductor.
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