公开(公告)号：US20180202958A1

公开(公告)日：2018-07-19

申请号：US15763294

申请日：2016-09-19

Applicant: AMS Sensors UK Limited

Inventor： Syed Zeeshan ALI ,  Matthew GOVETT ,  Simon Jonathan STACEY

IPC: G01N27/12 ,  G01N27/22 ,  G01N27/414

CPC classification number: G01N27/128 ,  B81B2201/02 ,  G01N27/22 ,  G01N27/414

Abstract: Disclosed herein is a gas sensing device comprising a dielectric membrane formed on a semiconductor substrate comprising a bulk-etched cavity portion, a heater located within or over the dielectric membrane, a material for sensing a gas which is located on one side of the membrane, a support structure located near the material, and a gas permeable region coupled to the support structure so as to protect the material.