公开(公告)号：US10460960B2

公开(公告)日：2019-10-29

申请号：US15372730

申请日：2016-12-08

Applicant: APPLIED MATERIALS, INC.

Inventor： Ashish Kumar ,  Vijayakumar Venugopal ,  Niladri Roy ,  Ramachandra Murthy Gunturi ,  Andreas Neuber ,  Stephen C. Wolgast

IPC: H01L21/67

Abstract: Embodiments of a system, a gas panel and method thereof having reduced exhaust requirements for the delivery of gases include distributing an inert gas in at least one interior portion of the gas panel in which a gas to be delivered by the gas panel is present. Embodiments can further include monitoring for leaks in the interior portion of the gas panel and, in response to a detected leak, increasing the distribution of the inert gas in at least the portion of the gas panel in which the leak was detected. Embodiments may further include exhausting gases out of the gas panel. In such embodiments, in response to a detected leak, a rate of the exhausting of the gases is increased. The gas panel can also be sealed to reduce an amount of gas that leaks out of or air that enters into the gas panel.