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公开(公告)号：US11815436B2
公开(公告)日：2023-11-14
申请号：US17819255
申请日：2022-08-11
Applicant: APPLIED MATERIALS, INC.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
CPC classification number: G01N1/02 , G01N15/02 , G01N15/065 , G01N15/14 , G01N2001/028 , G01N2015/0019 , G01N2015/0294 , G01N2015/1493 , G01N2015/1497
Abstract: A stream including at least one of solid CO2 particles or CO2 droplets is directed toward an article including surface particles. The stream causes at least a portion of the surface particles on the article to dislodge from a surface of the article. A purge cycle to transport at least a portion of the dislodged surface particles away from the surface of the article is initiated. The purge cycle includes generating a laminar flow at a first velocity for a first time period and subsequently generating a laminar flow at a second velocity for a second time period. A determination is made of whether a number of particles transported away from the surface of the article satisfies a particle criterion. In response to a determination that the number of particles transported away from the article does not satisfy the criterion, the purge cycle is re-initiated.
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公开(公告)号：US10755903B2
公开(公告)日：2020-08-25
申请号：US15397883
申请日：2017-01-04
Applicant: Applied Materials, Inc.
Inventor： Sidharth Bhatia , Zhili Zuo , Hidehiro Kojiri , Anjana M. Patel , Song-Moon Suh , Ganesh Balasubramanian
Abstract: A method of cleaning a remote plasma source includes supplying a first cycle of one or more first cleaning gases to a remote plasma source. The method includes supplying a second cycle of one or more second cleaning gases to the remote plasma source. The method includes supplying one or more cooling fluids to one or more cooling conduits coupled with the remote plasma source.
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公开(公告)号：US20240060860A1
公开(公告)日：2024-02-22
申请号：US18493742
申请日：2023-10-24
Applicant: APPLIED MATERIALS, INC.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
CPC classification number: G01N1/02 , G01N15/02 , G01N15/065 , G01N15/14 , G01N2015/1497 , G01N2015/0019
Abstract: A distribution unit of a particle detection system initiates a particle collection process to dislodge one or more surface particles from a surface of an article based on a stream including at least one of solid CO2 particles or CO2 droplets. The dislodged surface particles are collected on a surface of a substrate having a pre-determined initial state including initial surface particles of the substrate. A measurement indicating a particle number concentration of detectable surface particles on the substrate after the particle collection process is completed is obtained. An initial particle number concentration of the initial surface particles of the pre-determined initial state is identified. A number of particles transported away from the surface of the article is determined based on the obtained measurement and the identified initial particle concentration.
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Patent Agency Ranking
公开(公告)号：US20220381653A1
公开(公告)日：2022-12-01
申请号：US17819255
申请日：2022-08-11
Applicant: APPLIED MATERIALS, INC.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
Abstract: A stream including at least one of solid CO2 particles or CO2 droplets is directed toward an article including surface particles. The stream causes at least a portion of the surface particles on the article to dislodge from a surface of the article. A purge cycle to transport at least a portion of the dislodged surface particles away from the surface of the article is initiated. The purge cycle includes generating a laminar flow at a first velocity for a first time period and subsequently generating a laminar flow at a second velocity for a second time period. A determination is made of whether a number of particles transported away from the surface of the article satisfies a particle criterion. In response to a determination that the number of particles transported away from the article does not satisfy the criterion, the purge cycle is re-initiated.
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公开(公告)号：US20250093238A1
公开(公告)日：2025-03-20
申请号：US18968156
申请日：2024-12-04
Applicant: Applied Materials, Inc.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
Abstract: A processing device of a particle detection system causes a distribution unit of the particle detection system to initiate a particle collection process to dislodge surface particles from a surface of an article based on a stream including solid carbon dioxide (CO2) particles and/or CO2 droplets directed toward the article. A portion of the dislodged surface particles are collected by a particle sampling component that determines, for collected particles and in real-time, a particle number concentration, a particle size, and/or a particle size distribution. A determination is made based on a signal received by the particle sampling component that the at least one of the particle number concentration, the particle size, or the particle size distribution of the portion of the dislodged surface particles satisfies one or more collection criteria. The processing device causes the distribution unit of the particle detection system to terminate the particle collection process.
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公开(公告)号：US20210033499A1
公开(公告)日：2021-02-04
申请号：US16529630
申请日：2019-08-01
Applicant: APPLIED MATERIALS, INC.
Inventor： ChangGong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
Abstract: Disclosed herein is a method comprising directing, from a distribution unit, a stream comprising at least one of solid CO2 particles or CO2 droplets toward an article, wherein the article comprises a plurality of surface particles, and wherein the stream comprising at least one of solid CO2 particles or CO2 droplets causes at least a portion of the plurality of surface particles on the article to dislodge from the surface of the article; collecting, on a surface of a substrate having a pre-determined initial state comprising initial surface particles on the surface of the substrate or a real-time aerosol sampling unit, at least some of the portion of the plurality of surface particles dislodged from the surface of the article; analyzing the surface of the substrate after performing the collecting; and determining at least one of a size, a morphology, a chemical composition, a particle number concentration, or a particle size distribution of the portion of the plurality of surface particles that were dislodged from the surface of the article and collected on the surface of the substrate.
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公开(公告)号：US12169163B2
公开(公告)日：2024-12-17
申请号：US18493742
申请日：2023-10-24
Applicant: APPLIED MATERIALS, INC.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
Abstract: A distribution unit of a particle detection system initiates a particle collection process to dislodge one or more surface particles from a surface of an article based on a stream including at least one of solid CO2 particles or CO2 droplets. The dislodged surface particles are collected on a surface of a substrate having a pre-determined initial state including initial surface particles of the substrate. A measurement indicating a particle number concentration of detectable surface particles on the substrate after the particle collection process is completed is obtained. An initial particle number concentration of the initial surface particles of the pre-determined initial state is identified. A number of particles transported away from the surface of the article is determined based on the obtained measurement and the identified initial particle concentration.
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公开(公告)号：US11441974B2
公开(公告)日：2022-09-13
申请号：US16529630
申请日：2019-08-01
Applicant: APPLIED MATERIALS, INC.
Inventor： Changgong Wang , Zhili Zuo , Chang Ke , Song-Moon Suh
Abstract: Disclosed herein is a method comprising directing, from a distribution unit, a stream comprising at least one of solid CO2 particles or CO2 droplets toward an article, wherein the article comprises a plurality of surface particles, and wherein the stream comprising at least one of solid CO2 particles or CO2 droplets causes at least a portion of the plurality of surface particles on the article to dislodge from the surface of the article; collecting, on a surface of a substrate having a pre-determined initial state comprising initial surface particles on the surface of the substrate or a real-time aerosol sampling unit, at least some of the portion of the plurality of surface particles dislodged from the surface of the article; analyzing the surface of the substrate after performing the collecting; and determining at least one of a size, a morphology, a chemical composition, a particle number concentration, or a particle size distribution of the portion of the plurality of surface particles that were dislodged from the surface of the article and collected on the surface of the substrate.
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