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1.发明授权Method of reducing specimen contamination in an electron probe by cooling the objective lens 失效通过冷却目标镜片减少电子探针中样品污染的方法
公开(公告)号：US3558878A
公开(公告)日：1971-01-26
申请号：US3558878D
申请日：1968-07-17
Applicant: APPLIED RES LAB
Inventor： NEUHAUS HERMANN
IPC: H01J37/141 , H01J37/252 , H01J37/14 , G01N23/22
CPC classification number: H01J37/252 , H01J37/141
Abstract: An electron microprobe including a magnetic objective lens for focusing an electron beam upon a specimen, and means for cooling the lens to a temperature below about - 20*. It is found that operating results are greatly improved by maintaining the lens cold and the specimen warm. Contamination of the specimen, particularly by carbonaceous materials, can be reduced by more than an order of magnitude without compromise with the operational features of the instrument.
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