Abstract:
A method including (a) preparing an insulating substrate, and (b) forming n (n is an integer equal to or greater than 9) through holes on the insulating substrate in a through hole density in a range of 1000 pieces/cm2 to 20000 pieces/cm2 at a pitch P (μm) in a range of 20 μm to 300 μm, wherein (b) is performed on a front surface of the insulating substrate and includes (b1) forming a first through hole at a first target position, (b2) forming a second through hole at a second target position, wherein a distance between the first target position and the second target position is greater than the pitch P (μm) . . . , and (bn) forming an n-th final through hole at an n-th target position, wherein a distance between the (n−1) target position and the n-th target position is greater than the pitch P (μm).
Abstract translation:一种方法,包括(a)制备绝缘基板,以及(b)通过绝缘基板上的通孔密度在1000个/ cm 2至20000的范围内形成n(n是等于或大于9的整数) 以(μm)的间距P(μm)为20μm〜300μm的片/ cm 2,(b)在绝缘性基板的正面进行,(b1)在第一目标位置形成第一通孔, (b2)在第二目标位置形成第二通孔,其中,所述第一目标位置与所述第二目标位置之间的距离大于所述间距P(μm)。 。 。 ,并且(bn)在第n个目标位置形成第n个最终通孔,其中(n-1)目标位置和第n个目标位置之间的距离大于间距P(μm)。
Abstract:
A method of manufacturing an intermediate product for an interposer including a glass substrate having a plurality of through holes is provided. The method includes a step of forming a resin layer on a support substrate, and a step of forming a laminated body by adhering the glass substrate having the plurality of through holes on the resin layer. The glass substrate having the plurality of through holes has a thickness within a range of 0.05 mm to 0.3 mm.
Abstract:
A method of manufacturing an intermediate product for an interposer including a glass substrate having a plurality of through holes is provided. The method includes a step of forming a resin layer on a support substrate, and a step of forming a laminated body by adhering the glass substrate having the plurality of through holes on the resin layer. The glass substrate having the plurality of through holes has a thickness within a range of 0.05 mm to 0.3 mm.
Abstract:
A method of manufacturing a glass component includes preparing a glass substrate having a thickness greater than or equal to 300 μm, forming first electric wires on a first surface of the glass substrate, forming a structure by joining the glass substrate via a resin layer to a support substrate such that the first surface of the glass substrate faces the resin layer, thinning the glass substrate from a second surface of the glass substrate to a thickness between 10 μm and 80 μm, forming through holes in the glass substrate by irradiating the glass substrate from the second surface with a laser beam, forming second electric wires on the second surface of the glass substrate such that the second electric wires are electrically connected to the corresponding first electric wires via conductors filling the through holes, and separating the glass substrate from the support substrate.
Abstract:
A method of manufacturing a glass substrate having a through hole, includes preparing a glass substrate having an average coefficient of thermal expansion in a range of 55×0−7/K to 120×10−7/K at 50° C. to 300° C., and a thickness of 0.2 mm or greater and 1 mm or less, and forming the through hole in the glass substrate using a laser-guided discharge technique.