公开(公告)号：US20250118584A1

公开(公告)日：2025-04-10

申请号：US18905937

申请日：2024-10-03

Applicant: ASM IP Holding B.V.

Inventor： Masashi Nakano

IPC: H01L21/677 ,  H01L21/687

Abstract: Examples of a substrate transfer device includes a load lock chamber (LLC), a first wafer handling chamber (WHC), a first transfer robot fixed at a first attachment position in the first WHC, a pass through chamber (PTC) that is in contact with the first WHC, a substrate stage provided in the PTC, a second WHC that is in contact with the PTC, and a second transfer robot fixed at a second attachment position in the second WHC. A first angle that is an angle formed by a first virtual line that connects the first attachment position and the second attachment position and a second virtual line that connects the first attachment position and the substrate stage is equal to a second angle that is an angle formed by the first virtual line and a third virtual line that connects the second attachment position and the substrate stage.

公开(公告)号：US20230069600A1

公开(公告)日：2023-03-02

申请号：US17823249

申请日：2022-08-30

Applicant: ASM IP Holding, B.V.

Inventor： Masashi Nakano ,  Wataru Kobayashi

IPC: F16P3/08 ,  B25J21/00 ,  F24F11/00 ,  G05B19/05 ,  F04D27/00 ,  G08B7/06 ,  G08B21/18

Abstract: Examples of an interface module includes a fan filter unit having a fan and a filter, a housing surrounding a space adjacent to the filter, the housing includes a door, an upper housing surrounding a space adjacent to the fan, a first port provided in the upper housing, a second port communicating to a FFU internal space, the FFU internal space is a space between the fan and the filter in the fan filter unit, and a differential pressure gauge connected to the first port and the second port to detect a differential pressure between an interior of the upper housing and the FFU internal space.

公开(公告)号：US20230332791A1

公开(公告)日：2023-10-19

申请号：US18302110

申请日：2023-04-18

Applicant: ASM IP Holding, B.V.

Inventor： Masashi Nakano ,  Masaei Suwada

IPC: F24F11/50 ,  H01L21/67 ,  F24F11/00

CPC classification number: F24F11/50 ,  H01L21/67017 ,  F24F11/0001

Abstract: Examples of an interface module include a fan filter unit including a fan and a filter, a housing surrounding a space adjacent to the filter, a discharge system attached to the housing, a substrate support instrument provided in the housing, an upper housing surrounding a space adjacent to the fan, a gas supply system attached to the upper housing, a circulation duct connected to the housing and the upper housing, and a radiator provided between the fan and the filter.