公开(公告)号：US20230184539A1

公开(公告)日：2023-06-15

申请号：US18076788

申请日：2022-12-07

Applicant: ASM IP Holding B.V.

Inventor： Dinkar Nandwana ,  Dinh Tran ,  Allen D'Ambra ,  Gary Powell

IPC: G01B11/06 ,  C23C16/44

CPC classification number: G01B11/0683 ,  C23C16/4405 ,  C23C16/45536

Abstract: An endpoint detection system for use in detecting an endpoint of a refurbishment process for process chamber components. The refurbishment process involves use of an etchant bath to etch or clean chamber components after their use a reaction chamber in semiconductor processing to remove deposited materials including oxide films or the like. The endpoint detection system is configured to use measurements of reflected electromagnetic radiation from surfaces of the component in an etchant bath, transmitted electromagnetic radiation passing through holes in the chamber component while the component is in the etchant bath, or both to detect process endpoints. The process endpoints can coincide with a desired amount of removal of the deposited materials from surfaces and/or through holes in the chamber component. Upon detection of the endpoints, the chamber component can be removed from the etchant to limit over etching of materials from the chamber component to increase useful life.