公开(公告)号：US20250132131A1

公开(公告)日：2025-04-24

申请号：US18919874

申请日：2024-10-18

Applicant: ASM IP Holding B.V.

Inventor： Akshay Gunaji ,  Sergei Golovkov ,  ByungWook Son ,  Gopu Krishna ,  DaeYoun Kim

IPC: H01J37/32

Abstract: A plasma modulation apparatus for use in a substrate processing system is disclosed. The apparatus comprising: a plurality of radio frequency (RF) paths connected to N different meshes, wherein a susceptor of the substrate processing system is divided into the N different meshes and N is an integer equal to or greater than 2, wherein each of the RF paths comprises: an RF rod connected to a mesh and configured to transmit RF signal from the meshes; a Voltage-Current (VI) sensor connected to the RF rod and configured to measure a current from the RF rod; and a variable impedance circuit connected to the VI sensor and configured to change an impedance of the RF path and further configured to be grounded, wherein each of the RF paths are grounded separately and each of the RF paths corresponds to a different mesh, respectively.

公开(公告)号：US12249501B2

公开(公告)日：2025-03-11

申请号：US18674025

申请日：2024-05-24

Applicant: ASM IP Holding B.V.

Inventor： Hoyoun Jang ,  Gopu Krishna

IPC: H01J9/36 ,  H01J9/24 ,  H01J9/30 ,  H01J9/34 ,  H01J37/32

Abstract: A method of providing a stable connector used in a deposition apparatus is presented. The method may include forming a dome-shaped electrode connector inside of a ceramic material, drilling out a part of the ceramic material along with a portion of the dome-shaped electrode connector to flatten the electrode connector, and bonding a rod into a remaining part of the electrode connector. The method would provide a stable electrode connector which could hold the entire length of the rod which is bonded onto it. The length of the flattened electrode connector could be 5 mm.

公开(公告)号：US20240404779A1

公开(公告)日：2024-12-05

申请号：US18674025

申请日：2024-05-24

Applicant: ASM IP Holding B.V.

Inventor： Hoyoun Jang ,  Gopu Krishna

IPC: H01J9/36 ,  H01J9/24 ,  H01J9/30 ,  H01J37/32

Abstract: A method of providing a stable connector used in a deposition apparatus is presented. The method may comprise forming a dome-shaped electrode connector inside of a ceramic material, drilling out a part of the ceramic material along with a portion of the dome-shaped electrode connector to flatten the electrode connector; and bonding a rod into a remaining part of the electrode connector. The method would provide a stable electrode connector which could hold the entire length of the rod which is bonded onto it. The length of the flattened electrode connector could be 5 mm.