公开(公告)号：US20240087944A1

公开(公告)日：2024-03-14

申请号：US18243173

申请日：2023-09-07

Applicant: ASM IP Holding B.V.

Inventor： George Brad Jackson ,  Rohan Rajeev Puranik ,  Todd Robert Dunn ,  Yingzong Bu ,  Ruchik Jayeskumar Bhatt

IPC: H01L21/687

CPC classification number: H01L21/68742

Abstract: A lift pin assembly includes a holder to engage and secure the lift pin and a bellow to actuate the lift pin and the holder linearly and vertically. The holder includes three pieces that connect together to secure the lift pin within the holder. The holder includes a first piece having a recessed area, a second piece that nests within the recessed area, and a third piece adjacent the first and second pieces. The second piece contains a threaded hole to receive and secure the lift pin and the third piece contains a through-hole that aligns with the threaded hole of the second piece.