公开(公告)号：US20230176494A1

公开(公告)日：2023-06-08

申请号：US17922922

申请日：2021-04-22

Applicant: ASML HOLDING N.V. ,  ASML NETHERLANDS B.V.

Inventor： Zahrasadat DASTOURI ,  Igor Matheus Petronella AARTS ,  Simon Gijsbert Josephus MATHIJISSEN ,  Peter David ENGBLOM

IPC: G03F9/00 ,  G03F7/20

CPC classification number: G03F9/7088 ,  G03F9/7092 ,  G03F9/7049 ,  G03F7/70633

Abstract: A method for generating an alignment signal that includes detecting local dimensional distortions of an alignment mark and generating the alignment signal based on the alignment mark. The alignment signal is weighted based on the local dimensional distortions of the alignment mark. Detecting the local dimensional distortions can include irradiating the alignment mark with radiation, the alignment mark including a geometric feature, and detecting one or more phase and/or amplitude shifts in reflected radiation from the geometric feature. The one or more phase and/or amplitude shifts correspond to the local dimensional distortions of the geometric feature. A parameter of the radiation, an alignment inspection location within the geometric feature, an alignment inspection location on a layer of a structure, and/or a radiation beam trajectory across the geometric feature may be determined based on the one or more detected phase and/or amplitude shifts.