公开(公告)号：US20180203362A1

公开(公告)日：2018-07-19

申请号：US15743273

申请日：2016-06-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Wilhelmus Patrick Elisabeth Maria OP 'T ROOT ,  Herman Philip GODFRIED ,  Hubertus Petrus Leonardus Henrica VAN BUSSEL ,  Arij Jonathan RIJKE ,  Marc Wilhelmus Maria VAN DER WIJST ,  Mathijs Leonardus Johan VERHEES

IPC: G03F7/20

CPC classification number: G03F7/70041 ,  G03F7/70133 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/709

Abstract: A technique involving projecting a pulsed radiation beam using an illumination system onto a region of a plane in a reference frame; using a scanning mechanism to move a calibration sensor relative to the reference frame such that the calibration sensor moves through the beam of radiation in the plane along a scan trajectory; determining a quantity indicative of a velocity of the illumination system relative to the reference frame; and determining information related to a spatial intensity distribution of the radiation beam in the plane in dependence on: (a) an output of the calibration sensor; (b) the scan trajectory of the calibration sensor; and (c) the quantity indicative of a velocity of the illumination system relative to the reference frame.