公开(公告)号：US20250166161A1

公开(公告)日：2025-05-22

申请号：US18841032

申请日：2023-02-03

Applicant: ASML Netherlands B.V.

Inventor： Hairong LEI ,  Qian DONG ,  Cho Huak TEH ,  Lingling PU ,  Chih-Yu JEN ,  Chia Wen LIN

IPC: G06T7/00

Abstract: An automatic defect classification method may include obtaining a set of image data comprising a set of candidate defects from an inspection tool, developing a plurality of defect review types and a plurality of nuisance review types, and classifying the set of candidate defects according to the defect review types and nuisance review types using a machine learning classifier. Using the plurality of nuisance review types in the classification method reduces a nuisance rate.