公开(公告)号：US20250027990A1

公开(公告)日：2025-01-23

申请号：US18713108

申请日：2022-10-26

Applicant: ASML Netherlands B.V.

Inventor： Datong ZHANG ,  Xiaoyu JI ,  Weiming REN ,  Xuedong LIU ,  Chia Wen LIN

IPC: G01R31/307 ,  H01J37/28

Abstract: Systems and methods of inspecting a sample using a charged-particle beam apparatus with enhanced probe current and high current density of the primary charged-particle beam are disclosed. The apparatus includes a charged-particle source, a first condenser lens configured to condense the primary charged-particle beam and operable in a first mode and a second mode, wherein: in the first mode, the first condenser lens is configured to condense the primary charged-particle beam, and in the second mode, the first condenser lens is configured to condense the primary charged-particle beam sufficiently to form a crossover along the primary optical axis. The apparatus further includes a second condenser lens configured to adjust a first beam current of the primary charged-particle beam in the first mode and adjust a second beam current of the primary charged-particle beam in the second mode, the second beam current being larger than the first beam current.

公开(公告)号：US20250166161A1

公开(公告)日：2025-05-22

申请号：US18841032

申请日：2023-02-03

Applicant: ASML Netherlands B.V.

Inventor： Hairong LEI ,  Qian DONG ,  Cho Huak TEH ,  Lingling PU ,  Chih-Yu JEN ,  Chia Wen LIN

IPC: G06T7/00

Abstract: An automatic defect classification method may include obtaining a set of image data comprising a set of candidate defects from an inspection tool, developing a plurality of defect review types and a plurality of nuisance review types, and classifying the set of candidate defects according to the defect review types and nuisance review types using a machine learning classifier. Using the plurality of nuisance review types in the classification method reduces a nuisance rate.

公开(公告)号：US20200243299A1

公开(公告)日：2020-07-30

申请号：US16649975

申请日：2018-09-21

Applicant: ASML Netherlands B.V.

Inventor： Joe WANG ,  Chia Wen LIN ,  Zhongwei CHEN ,  Chang-chun YEH

IPC: H01J37/244 ,  H01J37/22

Abstract: Disclosed herein an apparatus and a method for detecting buried features using backscattered particles. In an example, the apparatus comprises a source of charged particles; a stage; optics configured to direct a beam of the charged particles to a sample supported on the stage; a signal detector configured to detect backscattered particles of the charged particles in the beam from the sample; wherein the signal detector has angular resolution. In an example, the methods comprises obtaining an image of backscattered particles from a region of a sample; determining existence or location of a buried feature based on the image.