公开(公告)号：US10078167B2

公开(公告)日：2018-09-18

申请号：US14490966

申请日：2014-09-19

Applicant: ASML Netherlands B.V.

Inventor： Ekkehard Brune ,  Dieter Frerking ,  Thomas Thöniß ,  Claus Spruch

IPC: F21V7/04 ,  F21V8/00 ,  G02B27/09 ,  G02B6/14 ,  H01S3/00 ,  H01J65/04

Abstract: A laser-operated light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source furthermore encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. In the case of the light source according to the invention, at least one mode scrambler is assigned to the optical fiber or the optical fibers.