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公开(公告)号：US20250130508A1
公开(公告)日：2025-04-24
申请号：US18572449
申请日：2022-06-13
Applicant: ASML Netherlands B.V.
Inventor： Hao-Chih WANG , Samira FARSINEZHAD , Sotrios SYRINTZIS , Keane Michael LEVY
IPC: G03F7/00
Abstract: A method includes treating a burled surface of an object using radiation or heat and setting parameters of the radiation or heat to effectuate a predetermined surface strength, hardness, roughness, coefficient of friction, chemical resistance, wear resistance, and/or corrosion of the burled surface.
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