公开(公告)号：US20240176254A1

公开(公告)日：2024-05-30

申请号：US18281921

申请日：2022-03-17

Applicant: ASML Netherlands B.V.

Inventor： Keane Michael LEVY ,  Sotrios LYRINTZIS ,  Maham AFTAB ,  Seyed Mehdi SHEIKHOLESLAM-NOURI ,  Tammo UITTERDIJK

IPC: G03F7/00 ,  H01L21/683

CPC classification number: G03F7/70708 ,  G03F7/70783 ,  H01L21/6833

Abstract: Systems, apparatuses, and methods are provided for manufacturing an electrostatic clamp. An example method can include forming a dielectric layer that includes a plurality of burls for supporting an object. The example method can further include forming an electrostatic layer that includes one or more electrodes. The example method can further include generating, using the electrostatic layer, an electrostatic force to electrostatically clamp the object to the plurality of burls in response to an application of one or more voltages to the one or more electrodes. In some aspects, a first magnitude of the electrostatic force in a first region of the dielectric layer can be different than a second magnitude of the electrostatic force in a second region of the dielectric layer. For example, the first magnitude and the second magnitude can be part of a linear, non-linear, or stepped (e.g., multi-level) electrostatic force gradient.

公开(公告)号：US20250130508A1

公开(公告)日：2025-04-24

申请号：US18572449

申请日：2022-06-13

Applicant: ASML Netherlands B.V.

Inventor： Hao-Chih WANG ,  Samira FARSINEZHAD ,  Sotrios SYRINTZIS ,  Keane Michael LEVY

IPC: G03F7/00

Abstract: A method includes treating a burled surface of an object using radiation or heat and setting parameters of the radiation or heat to effectuate a predetermined surface strength, hardness, roughness, coefficient of friction, chemical resistance, wear resistance, and/or corrosion of the burled surface.

公开(公告)号：US20250069932A1

公开(公告)日：2025-02-27

申请号：US18724495

申请日：2022-11-25

Applicant: ASML Netherlands B.V.

Inventor： Martinus Cornelis REIJNEN ,  Thomas POIESZ ,  René Adrianus VAN ROOIJ ,  Alexander Barbara Jacobus Maria DRIESSEN ,  Keane Michael LEVY

IPC: H01L21/683

Abstract: The invention provides an object holder to hold an object, comprising: a clamp side to clamp the object, wherein the clamp side is electrically conductive, at least one electrode arranged at a distance from the clamp side, and electrically isolated from the clamp side, a controller arranged to provide an electrode voltage to the at least one electrode based on a measured charge signal representative for a charge level of the object holder and/or the object in order to decrease a potential difference between an electrical potential of the clamp side and an electrical potential of the object.