公开(公告)号：US20250012855A1

公开(公告)日：2025-01-09

申请号：US18712464

申请日：2022-10-28

Applicant: ASML Netherlands B.V.

Inventor： Dongchi YU ,  Erheng WANG ,  Jun-li LIN ,  Shao-Wei FU ,  Yi-Chen LIN

IPC: G01R31/28 ,  G01R31/307

Abstract: Systems and structures for venting and flow conditioning operations in charged particle beam systems. In some embodiments, a system may include a chamber configured to provide a vacuum environment; a vent valve; and a mass flow controller coupled to the chamber on a first side of the mass flow controller and to the vent valve on a second side of the mass flow controller.