公开(公告)号：US10948421B2

公开(公告)日：2021-03-16

申请号：US15506850

申请日：2015-08-27

Applicant: ASML Netherlands B.V.

Inventor： Martijn Petrus Christianus Van Heumen ,  Sergii Denega ,  Ralph Jozef Johannes Gerardus Anna Maria Smeets ,  Remco Marcel Van Dijk ,  Marc Van Kemenade

IPC: H01J65/04 ,  H01J65/06 ,  G01N21/88 ,  G01N21/956 ,  G03F7/20 ,  G01N21/95

Abstract: Disclosed is a laser-driven photon source comprising drive optics which focus drive radiation so as to maintain a plasma. The point spread function of the drive optics has a point spread function (75) which is configured such that a spectral position of a peak output wavelength of a black body portion of output radiation emitted by said plasma within a desired wavelength band.