公开(公告)号：US20210151280A1

公开(公告)日：2021-05-20

申请号：US17135915

申请日：2020-12-28

Applicant: ASML Netherlands B.V.

Inventor： Xuerang HU ,  Xuedong LIU ,  Zhong-Wei CHEN ,  Weiming REN

IPC: H01J37/153 ,  H01J37/14 ,  H01J37/147

Abstract: An improved source conversion unit of a charged particle beam apparatus is disclosed. The source conversion unit comprises a first micro-structure array including a plurality of micro-structures. The plurality of micro-structures is grouped into one or more groups. Corresponding electrodes of micro-structures in one group are electrically connected and driven by a driver to influence a corresponding group of beamlets. The micro-structures in one group may be single-pole structures or multi-pole structures. The micro-structures in one group have same or substantially same radial shifts from an optical axis of the apparatus. The micro-structures in one group have same or substantially same orientation angles with respect to their radial shift directions.