公开(公告)号：US10211805B2

公开(公告)日：2019-02-19

申请号：US15114734

申请日：2015-02-11

Applicant: Agency for Science, Technology and Research

Inventor： Jinghui Xu ,  Nan Wang ,  Yuandong Alex Gu

IPC: H03H9/15 ,  H03H9/19 ,  H03H9/46 ,  H03H9/52 ,  H03H9/54 ,  H03H9/02 ,  H03H9/56 ,  H03H9/24 ,  H01H1/00

Abstract: According to various embodiments, there is provided a micro-electromechanical resonator, including a substrate with a cavity therein; and a resonating structure suspended over the cavity, the resonating structure having a first end anchored to the substrate, wherein the resonating structure is configured to flex in a flexural mode along a width direction of the resonating structure, wherein the width direction is defined at least substantially perpendicular to a length direction of the resonating structure, wherein the length direction is defined from the first end to a second end of the resonating structure, wherein the second end opposes the first end.

公开(公告)号：US20180054183A2

公开(公告)日：2018-02-22

申请号：US15114734

申请日：2015-02-11

Applicant: Agency for Science, Technology and Research

Inventor： Jinghui Xu ,  Nan Wang ,  Yuandong Alex Gu

IPC: H03H9/19 ,  H03H9/56

CPC classification number: H03H9/02409 ,  B81B2201/0271 ,  H01H2001/0078 ,  H03H9/02448 ,  H03H9/19 ,  H03H9/2457 ,  H03H9/2463 ,  H03H9/56 ,  H03H2009/02291 ,  H03H2009/02488

Abstract: According to various embodiments, there is provided a micro-electromechanical resonator, including a substrate with a cavity therein; and a resonating structure suspended over the cavity, the resonating structure having a first end anchored to the substrate, wherein the resonating structure is configured to flex in a flexural mode along a width direction of the resonating structure, wherein the width direction is defined at least substantially perpendicular to a length direction of the resonating structure, wherein the length direction is defined from the first end to a second end of the resonating structure, wherein the second end opposes the first end.