Measuring instrument for reflectometric measurements
    1.
    发明授权
    Measuring instrument for reflectometric measurements 失效
    测量仪器进行反射测量

    公开(公告)号:US5748304A

    公开(公告)日:1998-05-05

    申请号:US687463

    申请日:1996-11-04

    Applicant: Aimo Heinonen

    Inventor: Aimo Heinonen

    CPC classification number: G01N21/474 G01N2021/1748 G01N21/33 G01N2201/065

    Abstract: A measuring instrument for reflectometric measurements, comprising a spherical measuring chamber (1) provided with a light source (2) and with a specimen aperture (3); a measuring channel (4) which has been provided with optics (5), with a photometer (6), with an optional stop (7) and with an optional filter (8); a reference channel (14) provided with optics (15), with a photometer (16), with an optional stop (17) and with an optional filter (18); and a signal processing and calculating device (20.sub.s, 20.sub.c) for processing and comparing with each other the light intensity values observed by means of the photometers in the measuring and reference channels. As taught by the invention, the measuring instrument comprises at least one visible light light source (2.sub.s) which emits substantially light having a wavelength mainly over about 380 nm, and a UV light source (2.sub.u) which emits substantially light in the UV range having a wavelength mainly under about 380 nm, advantageously 300 to 380 nm.

    Abstract translation: PCT No.PCT / FI95 / 00044 Sec。 371日期:1996年11月4日 102(e)日期1996年11月4日PCT 1995年1月30日PCT PCT。 WO95 / 20758 PCT公开号 日期1995年8月3日一种用于反射测量的测量仪器,包括设置有光源(2)和具有试样孔(3)的球形测量室(1)。 具有光学器件(5)的测量通道(4),具有光度计(6),可选的止动件(7)和可选的过滤器(8); 具有光学器件(15)的参考通道(14),具有光度计(16),具有可选的止动件(17)和可选的过滤器(18); 以及用于在测量和参考通道中通过光度计观察到的光强度值进行处理和比较的信号处理和计算装置(20s,20c)。 如本发明所教导的,测量仪器包括至少一个可发射基本上具有波长主要在约380nm波长的光的可见光光源(2s),以及在UV范围内基本上发光的UV光源(2u) 主要在约380nm,有利地为300至380nm的波长。

    Reflectometric method of measurement and apparatus for realizing the
method
    2.
    发明授权
    Reflectometric method of measurement and apparatus for realizing the method 失效
    用于实现该方法的测量方法和装置

    公开(公告)号:US5182618A

    公开(公告)日:1993-01-26

    申请号:US793261

    申请日:1991-11-13

    Applicant: Aimo Heinonen

    Inventor: Aimo Heinonen

    Abstract: A reflectometric method of measurement for a 2-channel reflectometer, wherein in connection with the calibration, the standard sample is placed in the measruing channel (4), the dimming of the measuring channel is set to a random position and the light intensities detected both in the measuring channel and the reference channel (14) are adjusted into balance by adjusting the dimming of the reference channel by aid of the measuring diaphragm (17), and the measuring of the sample is carried out by setting the intensities into balance, likewise by aid of the measuring diaphragm of the reference channel. The reflectance value of the sample under measurement is calculated from the reflectance value of the standard, by aid of the set value of the measuring diaphragm obtained in the measurement and on the basis of the set value of the measuring diaphragm obtained in the calibration measurement.

    Abstract translation: 2通道反射计的反射测量方法,其中结合校准将标准样品放置在测量通道(4)中,将测量通道的调光设置为随机位置,并且检测到光强度 通过借助测量膜片(17)调节参考通道的调光,将测量通道和参考通道(14)调整为平衡,通过将强度设定为平衡来进行样品的测量 借助于参考通道的测量膜片。 通过在测量中获得的测量膜的设定值和基于在校准测量中获得的测量膜的设定值,从标准物的反射率值计算测量样品的反射率值。

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