公开(公告)号：US20230051521A1

公开(公告)日：2023-02-16

申请号：US17403693

申请日：2021-08-16

Applicant: Applied Material, Inc.

Inventor： Wolfgang Aderhold ,  Samuel Howells ,  Amritha Rammohan ,  Huy Q. Nguyen

IPC: H01L21/67 ,  G01J5/00 ,  G01J5/08

Abstract: Embodiments disclosed herein include a method for determining a temperature error of a pyrometer. In an embodiment, the method comprises measuring a first signal with a first sensor of the pyrometer and measuring a second signal with a second sensor of the pyrometer. In an embodiment, the method further comprises determining a reflectivity of a reflector plate from the first signal and the second signal, and determining the temperature error using the reflectivity.