公开(公告)号：US20150097486A1

公开(公告)日：2015-04-09

申请号：US14505065

申请日：2014-10-02

Applicant: Applied Materials, Inc.

Inventor： Andrew NGUYEN ,  Kartik RAMASWAMY ,  Yogananda SARODE VISHWANATH ,  Alexander Charles MARCACCI

IPC: H01L21/67 ,  H01J7/46

CPC classification number: H01J7/46 ,  H01J37/32082 ,  H01J37/3244 ,  H01J37/32596

Abstract: A showerhead assembly includes a front plate having a front surface, a back surface and a plurality of first through holes connecting the front surface and the back surface, a back plate having a front surface, a back surface and a plurality of second through holes connecting the front surface and the back surface, and an adhesive layer joining the back surface of the front plate and the front surface of the back plate. The plurality of first through holes are aligned with the plurality of second through holes, and the front plate and the back plate are formed from dissimilar materials.

Abstract translation: 一种喷头组件，包括具有前表面，后表面和连接前表面和后表面的多个第一通孔的前板，具有前表面，后表面和后表面的多个第二通孔， 前表面和后表面，以及将前板的后表面和后板的前表面接合的粘合剂层。 多个第一通孔与多个第二通孔对准，前板和后板由不同的材料形成。